“…A spectroscopic ellipsometer equipped with a temperature adapter enables the thermal analysis of the tested sample by optical measurements during controlled heating or cooling. Literature studies indicate that the characteristic temperatures of thermal transitions can be determined by analysing raw ellipsometric data on the basis of ellipsometric angles or their temperature derivatives [ 45 , 46 , 47 , 48 , 49 , 50 , 51 , 52 , 53 ]. The temperature dependence of physical quantities, such as film thickness, its coefficient of thermal expansion, refractive index, and ellipsometric data modelling [ 54 , 55 , 56 , 57 , 58 , 59 , 60 ] is also explored.…”