Mode transition in radio-frequency atmospheric argon discharges with and without dielectric barriers

Shi, Jianjun; Kong, Michael G.

doi:10.1063/1.2711413

Cited by 45 publications

(36 citation statements)

References 19 publications

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“…It is normally believed that operation in the ␥-mode at atmospheric pressure leads to a constriction of the discharge. 17,18 The discharges described in this letter, however, are diffuse unless otherwise noted. Therefore, the question of whether microdischarges operate in the ␣-mode against theoretical predictions in 2 and 7 or in a diffuse ͑rather than the typical constricted͒ ␥-mode arises.…”

Section: -mentioning

confidence: 99%

“…Therefore, we conclude that rf microdischarges operate in a diffused ␥-mode and that only at high power the microdischarge constricts radially as it is typically observed in millimeter-size atmospheric-pressure ␥ discharges. 17,18 The reasons for the constriction are subject of future investigations.…”

Section: -mentioning

confidence: 99%

“…The last point of each curve, i.e., the point of maximum current, corresponds to the discharge condition right before the transition to the constricted ␥-mode. 8,17,18 Figure 2 discharge conditions are marked with red stars in Fig. 1 and the patterns shown are characteristic for each gap size, i.e., no qualitative changes are observed if the current is changed within the range shown in Fig.…”

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confidence: 99%

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Electron avalanches and diffused γ-mode in radio-frequency capacitively coupled atmospheric-pressure microplasmas

2009

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Section: -mentioning

confidence: 99%

Section: -mentioning

confidence: 99%

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Electron avalanches and diffused γ-mode in radio-frequency capacitively coupled atmospheric-pressure microplasmas

2009

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“…The dominant mechanism depends on the amplitude of the voltage or the input power [51]. In this study, the first breakdown of the plasma cannot be obtained by the single RF voltage, an additional LF voltage must be supplied in order to produce a stable RF discharge.…”

Section: Rf Dischargementioning

confidence: 99%

Atmospheric-pressure diffuse dielectric barrier discharges in Ar/O₂gas mixture using 200 kHz/13.56 MHz dual frequency excitation

Liu

Starostin²,

Peeters

et al. 2018

J. Phys. D: Appl. Phys.

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IntroductionDevelopment of a large linear or volumetric source of diffuse non-thermal plasma at atmospheric pressure remains to be an essential challenge both from a scientific and a technological point of view. Such a source is required in various applications including plasma-assisted gas phase chemical conversion, surface modification and synthesis of high quality functional thin films [1][2][3][4]. The emerging atmospheric-pressure plasma enhanced chemical vapour deposition (AP-PECVD) technology can potentially achieve a considerable cost efficiency in comparison to the common low-pressure plasma methods, by the possibility of in-line production and by avoiding expensive large-footprint vacuum equipment [5]. One of the common ways to create a large area non-thermal plasma at atmospheric pressure is the dielectric barrier discharge (DBD) AbstractAtmospheric-pressure diffuse dielectric barrier discharges (DBDs) were obtained in Ar/O 2 gas mixture using dual-frequency (DF) excitation at 200 kHz low frequency (LF) and 13.56 MHz radio frequency (RF). The excitation dynamics and the plasma generation mechanism were studied by means of electrical characterization and phase resolved optical emission spectroscopy (PROES). The DF excitation results in a time-varying electric field which is determined by the total LF and RF gas voltage and the spatial ion distribution which only responds to the LF component. By tuning the amplitude ratio of the superimposed LF and RF signals, the effect of each frequency component on the DF discharge mechanism was analysed. The LF excitation results in a transient plasma with the formation of an electrode sheath and therefore a pronounced excitation near the substrate. The RF oscillation allows the electron trapping in the gas gap and helps to improve the plasma uniformity by contributing to the pre-ionization and by controlling the discharge development. The possibility of temporally modifying the electric field and thus the plasma generation mechanism in the DF discharge exhibits potential applications in plasma-assisted surface processing and plasma-assisted gas phase chemical conversion.

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“…1 Atmospheric pressure plasma jet (APPJ) is a facile tool for plasma beam production and has received much attention because of its prospect in low-temperature processing of materials. [2][3][4][5][6][7][8][9][10][11][12][13][14] However, it is generally difficult to prepare high-quality thin films using an APPJ system. Therefore, a cylindrical nitrogen plasma source operating at low pressure is particularly interesting to produce high activity of plasma for synthesis of nitride films, 15,16 such as GaN, AlN, and SiN x , etc.…”

Section: Introductionmentioning

confidence: 99%

Determination of vibrational and rotational temperatures in highly constricted nitrogen plasmas by fitting the second positive system of N2 molecules

Zhang

Shi

et al. 2015

AIP Advances

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Highly constricted plasmas are an active research area because of their ability to generate high activity of plasma beams, which exhibit potential in applications of material processing and film deposition. In this study, optical emission spectroscopy was used to study the highly constricted nitrogen plasma created at low pressure. The vibrational and rotational temperatures of molecules were determined by fitting the second positive system of nitrogen molecule. Under the conditions of the power densities as high as 7 ∼ 85 W/cm3 and the pressures of 2 ∼ 200 Pa, the determined rotational temperature was found to be relatively low, increasing from 350 to 700 K and the vibrational temperature keeping at ∼ 5000 K. The analysis of dissipated power revealed that ∼ 80 % of input power is dissipated for the nitrogen molecule dissociation and the creation/loss of ions at the tube wall, producing an as high as 1012 ∼ 1013 cm−3 plasma with the nitrogen dissociation degrees of 2%∼15%. With the increase in the discharge pressure, more input power was found to be dissipated in the dissociation of nitrogen molecules instead of creation of ions, resulting in a higher density of radicals.

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Mode transition in radio-frequency atmospheric argon discharges with and without dielectric barriers

Abstract: Citation: SHI, J.J. and KONG, M.G., 2007. Mode transition in radio-frequency atmospheric argon discharges with and without dielectric barriers.

Cited by 45 publications

References 19 publications

Electron avalanches and diffused γ-mode in radio-frequency capacitively coupled atmospheric-pressure microplasmas

Electron avalanches and diffused γ-mode in radio-frequency capacitively coupled atmospheric-pressure microplasmas

Atmospheric-pressure diffuse dielectric barrier discharges in Ar/O₂gas mixture using 200 kHz/13.56 MHz dual frequency excitation

Determination of vibrational and rotational temperatures in highly constricted nitrogen plasmas by fitting the second positive system of N2 molecules

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Mode transition in radio-frequency atmospheric argon discharges with and without dielectric barriers

Abstract: Citation: SHI, J.J. and KONG, M.G., 2007. Mode transition in radio-frequency atmospheric argon discharges with and without dielectric barriers.

Cited by 45 publications

References 19 publications

Electron avalanches and diffused γ-mode in radio-frequency capacitively coupled atmospheric-pressure microplasmas

Electron avalanches and diffused γ-mode in radio-frequency capacitively coupled atmospheric-pressure microplasmas

Atmospheric-pressure diffuse dielectric barrier discharges in Ar/O2gas mixture using 200 kHz/13.56 MHz dual frequency excitation

Determination of vibrational and rotational temperatures in highly constricted nitrogen plasmas by fitting the second positive system of N2 molecules

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Atmospheric-pressure diffuse dielectric barrier discharges in Ar/O₂gas mixture using 200 kHz/13.56 MHz dual frequency excitation