Model-based spatial feedforward for over-actuated motion systems

Ronde, Mjc Michael; Schneiders, M.; Kikken, Ejgj; Molengraft, van de René René; Steinbuch, M Maarten

doi:10.1016/j.mechatronics.2013.09.010

Cited by 30 publications

(14 citation statements)

References 22 publications

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“…8 is controlled in all six motion degrees-of-freedom (DOF) (i.e., three rotations and three translations), where gravity compensators enable contactless operation. The maximum displacement in the translational DOFs (x, y, and z) is equal to 0.5 mm, while the range in the rotational DOFs (R x , R y , and R z ) is given by 1 mrad, see Ronde, Schneiders, Kikken, van de Molengraft, and Steinbuch (2014). The positioning stage is actuated by six Lorentz motors.…”

Section: Methodsmentioning

confidence: 99%

Non-diagonal H∞ weighting function design: Exploiting spatio-temporal deformations in precision motion control

Boeren

Herpen

Oomen

et al. 2015

Control Engineering Practice

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Section: Methodsmentioning

confidence: 99%

Non-diagonal H∞ weighting function design: Exploiting spatio-temporal deformations in precision motion control

Boeren

Herpen

Oomen

et al. 2015

Control Engineering Practice

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“…The method utilizes a lifted feedforward (discrete-time) representation, however, it does not take the plant variation in-between the timeintervals into account. Spatial feedforward control [10] has been developed in order to prevent excitation of the structural modes of the positioning system. However this method uses over-actuation.…”

Section: Introductionmentioning

confidence: 99%

A compliance feedforward scheme for a class of LTV motion systems

Kontaras

Heertjes

Zwart

et al. 2017

2017 American Control Conference (ACC)

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Abstract-The implementation of lightweight highperformance motion systems in lithography applications imposes among others lower requirements on actuators, amplifiers, and cooling. However, the decreased stiffness of lightweight designs brings the effect of structural flexibilities to the fore especially when the so-called point of interest is not at a fixed location. This is for example the case when exposing a silicon wafer. To deal with structural flexibilities, a feedforward controller is proposed that combines two concepts: (a) continuous compliance compensation control and (b) snap feedforward control. Expanded to a subclass of LTV motion systems, the resulting controller compensates for the position-dependent and time-varying compliance of a flexible structure. The compliance function used will be derived using partial differential equations (PDE). The method is validated by simulation results.

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“…The first time input shaping implemented on a real gantry crane was at Savanah Research Technology Centre [12] and researchers proved their approach was successful to move the cart without sway during hoisting. Recently, implementing methods of input shaping on cranes have been improved by researchers [13]. Despite the advent of many control theories and techniques, PID feedback controller is still one of the most widely used control algorithm in industries [14].…”

Section: Introductionmentioning

confidence: 99%