2024
DOI: 10.1093/mam/ozae106
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Model-Fitting Weighted Least Squares as an Alternative to Principal Component Analysis for Analyzing Energy-Dispersive X-ray Spectroscopy Spectrum Images

David Wahlqvist,
Martin Ek

Abstract: Spectrum imaging with energy-dispersive X-ray spectroscopy (EDS) has become ubiquitous in material characterization using electron microscopy. Multivariate statistical methods, commonly principal component analysis (PCA), are often used to aid analysis of the resulting multidimensional datasets; PCA can provide denoising prior to further analysis or grouping of pixels into distinct phases with similar signals. However, it is well known that PCA can introduce artifacts at low signal-to-noise ratios. Unfortunate… Show more

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