Model of capacitive micromechanical accelerometer including effect of squeezed gas film

Abstract

An electrical component model for a micromechanical accelerometer is presented. In addition to the varying capacitances, the motion of the seismic mass and the damping gas films are described by means of an electrical equivalent circuit. The resulting model can be analyzed together with the interfacing electronics utilizing all analysis modes available in a circuit simulator.The model has been implemented in the general purpose circuit simulation tool APLAC. The model simulations show an excellent match with the measured frequency responses.

Fast and accurate modeling and sensitivity analysis of an acquisition system for very low-g accelerations to be used in spacecraft testing and environmental noise measurements

“…State of the art simulating models can be found but they are often limited to just some components, e.g. the transducer [12][13][14][15][16][17], of the measuring system. Most works [12,[14][15][16][17] mainly propose computational intensive physical models focusing the design of optimized MEMS (microelectro-mechanical-sensors).…”

“…the transducer [12][13][14][15][16][17], of the measuring system. Most works [12,[14][15][16][17] mainly propose computational intensive physical models focusing the design of optimized MEMS (microelectro-mechanical-sensors). Sensor models for fast system level analysis and design space exploration are provided by industry [13] but often they simulate typical conditions without considering degradation of performance due to suboptimal operating conditions or the interaction with the other system components.…”

Circuit Simulation Model Of Gas Damping In Microstructures With Nontrivial Geometries

“…In practice, the elements inside the holes are replaced with dummy resistors. The final simulation model for the accelerometer mechanics includes the mesh circuit presented and a parallel resonance circuit [3] that models the mechanical harmonic oscillator consisting of the seismic mass M and the elastisity h: of the cantilever beams. The total force acting on the surfaces, Eq.…”