Model reduction techniques for dynamics analysis of ultra-precision linear stage

Abstract

Spring-damping elements are used to simplify the internal interaction in the proposed finite element (FE) model of an ultra-precision linear stage. The dynamics behavior is studied. The comparison between mode shapes from the eigenvalue analysis shows that the components, except the translator, can represent system dynamics characteristics. A reduction approach is used to simplify the system in a dynamic studied. There is little difference between the vibration mode and the response analysis. The experimental modal analysis proves the validity of the reduction approach, which can be generalized to the development and dynamics characteristic study of a complex system model to obviously save computational resource.

Comprehensive analysis of the influence of structural and dynamic parameters on the accuracy of nano-precision positioning stages

“…For example, Chen et al [10] and Li et al [11] conducted a numerical analysis to investigate the influence of gas slip effects, gas supply pressure, and gap parameters on the bearing capacity characteristics of aerostatic bearings. He and Chen [12], Chen and Li [13], and Bao and Mao [14] established dynamic models of ultra-precision positioning stages, including equivalent models of aerostatic bearings, and analyzed the influence of the stiffness characteristics of aerostatic bearings on the dynamic behavior of the stages. Denkena et al [15] established a finite element (FE) model of an ultraprecision positioning system and applied model order reduction to obtain a state space model for compensating dynamic errors.…”