Modeling and Analysis of Electrostatically Actuated MEMS under Combined Nonlinearities, Lorentz Force, and Mechanical Shock

Abstract

This paper shows an analysis of M EM S (micro electro mechanical systems) due to Lorentz force and mechanical shock. The formulation is based on a modified couple stress theory, the von Kármán geometric nonlinearity and Reynolds equation as well. The model contains a silicon microbeam, which is encircled by a stationary plate. The non-dimensional governing equations and associated boundary conditions are then solved iteratively through the Galerkin weighted method. The results show that pull-in voltage is dependent on the geometry nonlinearity. It is also demonstrated that by increasing voltage between the silicon microbeam and stationary plate, the pull-in instability happens.