2003
DOI: 10.1088/0964-1726/13/1/007
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Modeling and analysis of micro piezoelectric power generators for micro-electromechanical-systems applications

Abstract: The extremely small size of the micro-electromechanical systems (MEMS) makes them widely suitable for some special applications. The simplicity of the piezoelectric micro-generators is attractive for MEMS applications, especially for remote systems. In this paper, a general concept of the piezoelectric energy conversion is first given. A simple design modeling and analysis of the ‘31’ transverse mode type piezoelectric micro-generator is presented. The output power is taken as the indicated parameters for the … Show more

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Cited by 408 publications
(272 citation statements)
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“…Further modelling and analysis of the influence of load resistance on the output power of cantilevered piezoelectric bimorph generators has been presented by Lu et al [64]. The optimum load was found to vary for different piezoelectric generators as shown in equation (20) where t is the thickness of piezoelectric layer, b beam width, L is the length of the piezoelectric film on the beam, ε 33 the dielectric constant, ω the frequency and C p is the capacitance of piezoelectric element:…”
Section: Cantilever-based Piezoelectric Generatorsmentioning
confidence: 99%
“…Further modelling and analysis of the influence of load resistance on the output power of cantilevered piezoelectric bimorph generators has been presented by Lu et al [64]. The optimum load was found to vary for different piezoelectric generators as shown in equation (20) where t is the thickness of piezoelectric layer, b beam width, L is the length of the piezoelectric film on the beam, ε 33 the dielectric constant, ω the frequency and C p is the capacitance of piezoelectric element:…”
Section: Cantilever-based Piezoelectric Generatorsmentioning
confidence: 99%
“…where − · · · dt denotes the average over time [26,33]. Above W e is the time-averaged power dissipated across the load resistor R and W in is the time-averaged power done by the external force.…”
Section: Conversion Efficiency and Electrically Induced Dampingmentioning
confidence: 99%
“…It is (loss factor) max e = k 2 sys π , (Lesieutre et al [37]) (26) for small values of k 2 sys which is defined by…”
Section: Conversion Efficiency and Electrically Induced Dampingmentioning
confidence: 99%
“…The charge Q and current I are functions of the time and therefore the current amplitude can be obtained by the charge times the frequency [26]:…”
Section: Theoretical Model For Energy Harvestingmentioning
confidence: 99%