Modeling and Characterization of a Vernier Latching MEMS Variable Optical Attenuator

Abstract

We report on the modeling and testing of a Vernier latched MEMS variable optical attenuator (VOA) which uses chevron electrothermal microactuators to control fiber-to-fiber optical power coupling. The use of microlatches has the advantage of holding the mechanical position of the fiber, and therefore the level of attenuation, with no electrical energy supplied except only to change the attenuation. Results of analytical electro-thermomechanical models of the device are obtained and compared with experimental test results, showing a good agreement. A step resolution of 0.5 μm for this multi-state latched device is achieved using a Vernier latch approach. This incremental step size is smaller than previously reported latched microactuators. The VOA demonstrated an attenuation range of over 47 dB and an insertion loss of 1 dB. The wavelength dependent loss across the optical communications C-band is 1.4 dB at 40 dB attenuation and the 10-90% transition time of the unlatched VOA is measured to be 1.7 ms.[2012-0382]

Recent Progress in Silicon‐Based Photonic Integrated Circuits and Emerging Applications

“…[165,166] BAW resonators consist of a piezoelectric film placed between two metal electrodes, inducing an acoustic wave that propagates vertically along the bulk of the piezoelectric film and forms a standing wave between the electrodes. The piezoelectric film plays an important role in MEMS systems, such as optical attenuators, [167][168][169][170][171] scanning mirrors, [172][173][174][175][176] and energy harvesters [177][178][179][180][181][182][183][184][185][186] and transducers. [187][188][189][190] To increase communication frequency to the terahertz range, small-scale integrated photonic resonators have been studied and demonstrated, driving exploration at both the signal transmitter and receiver sides.…”

Four-stage cascaded variable optical attenuator with large attenuation range for quantum key distribution

“…A VOA based on a microelectromechanical system (MEMS) and free space is usually used in situations where large attenuation is needed. [5][6][7][8][9] For example, a MEMS VOA based on a vertical comb-drive achieved a dynamic range of 55 dB, and a free space VOA using frustrated total internal reflection obtained a dynamic range of 70 dB. [7,8] Other types of VOA with larger attenuation range have also been reported, such as an optofluidic VOA with an attenuation range up to 80 dB, [10] and liquid lens-based fiber VOAs demonstrate an attenuation range of 30 dB-40 dB.…”

A MEMS Variable Optical Attenuator with Ultra-Low Wavelength-Dependent Loss and Polarization-Dependent Loss

“…Chengkuo Lee’s group did much work to develop different mechanisms for MEMS VOAs, such as retro-reflective mirrors driven by electro-thermal actuators [7], and reflective mirrors driven by rotary comb drive actuators [8]. The most applicable mechanisms are the MEMS shutter [9,10] and the MEMS torsion mirror [11].…”