Modeling and Characterization of the Scratch Drive Actuator

Abstract

This paper presents the characterization of scratch drive actuators (SDAs) built using Sandia National Laboratories (SNL) SUMMiTTM V micromachining process. Experimental data is used to characterize the output step size as a function of input voltage. This data is correlated to an analytical model in an effort to better understand and predict the stepping motion of these devices. The experimental results match well with the predictions from the model. Experimental data shows that the step sizes are on the order of 10 nm, and force estimates show that one SDA is capable of producing forces in excess of 100 μN for each step.

Planar micromanipulation on microconveyor platforms: recent developments

“…The actuation cycle can then be repeated anew. Bronson et al (2004) conducted experiments with scratch actuators of various dimensions, with the most notable results being an average step of approximately 31μm for a 200x65μm plate and an electrostatic force of 117μN for 200V applied voltage with 100Hz frequency.…”