Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey

Abstract

Piezo-actuated stages have become more and more promising in nanopositioning applications due to the excellent advantages of the fast response time, large mechanical force, and extremely fine resolution. Modeling and control are critical to achieve objectives for high-precision motion. However, piezo-actuated stages themselves suffer from the inherent drawbacks produced by the inherent creep and hysteresis nonlinearities and vibration caused by the lightly damped resonant dynamics, which make modeling and control of such systems challenging. To address these challenges, various techniques have been reported in the literature. This paper surveys and discusses the progresses of different modeling and control approaches for piezo-actuated nanopositioning stages and highlights new opportunities for the extended studies.Note to Practitioners-Piezo-actuated nanopositioning stages featuring fast response, large force, and fine resolution appear poised to play an increasingly important role in fields requiring micro/nano positioning. Such stages, however, exhibit complex piezoelectric behavior, which is often neglected, including: frequency response, nonlinear electric field dependence, creep, aging, and thermal behavior. The presence of such a behavior observed in the stages poses challenges in realizing precise micro/nanopositioning performance. This paper presents an overview of the piezo-actuated nanopositioning stages emphasizing the key role of modeling and control techniques, where high accuracy is important.

A Flexure-Based Kinematically Decoupled Micropositioning Stage With a Centimeter Range Dedicated to Micro/Nano Manufacturing

“…Because there are frictions and motion gaps between the guides and sliders, higher accuracy is difficult to achieve, so future work can be focused on designing novel air-supported stages to improve the positioning accuracy. And we can also carry out some work on the dynamic design and control methodologies of these kinds of high speed positioning stages [28]- [29]. …”

Open loop control of piezoelectric tube transducer

“…in micro-and nano-positioning stages [1,2], vibration control [3], fluid power pilot valves [4][5][6], energy harvesting [7,8], and other areas in which conventional solutions cannot fulfil the increasing requirements with regard to fast response, high precision, high speed positioning and low energy costs. Piezoelectric actuators use inversed piezoelectric effect which converses applied electrical field to the surface of the material into deformation of the material.…”

“…Furthermore, it degrades the tracing performance in closedloop control systems. The hysteresis behavior is a dominant issue that has to be solved when application of piezo materials is considered [2,16].…”

Force control of piezoelectric walker

“…In particular, a pretty general framework was introduced in [7] concerned with modeling and control design for PZT positioning stages. One can find an extensive overview of modeling and control approaches for nanopositioning stages actuated by PZT actuators in [8]. In [9], a high-speed tracking control approach for third-order piezo-actuated nanopositioning stages, which extends the vibration control strategies tailored for damping the resonant modes of second-order systems to third-order systems is presented.…”