Modeling and designing quadratic membrane structures

Peters, D.; Bolte, Hilmar; Marschner, Claudia; Rehfuss, Sven; Laur, R.

doi:10.1016/s0026-2692(01)00099-4

Search citation statements

Order By: Relevance

Paper Sections

Select...

Top Plate Deformation1

Citation Types

Supporting

Mentioning

Contrasting

Year Published

2008

2009

Publication Types

Select...

Other4

Relationship

Self Cite0

Independent4

Authors

Journals

Cited by 4 publications

(1 citation statement)

References 5 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Thus, energy methods is proposed to find the solutions to Equation (1) with effects of internal stress. Energy methods calculate an equilibrium point between potential energy, kinetic energy and performed work [9]. The energy of bending and the energy caused by intrinsic stress can be calculated from the integral [6]:…”

Section: Top Plate Deformationmentioning

confidence: 99%

Theoretical Model of A Three Plates Capacitive Pressure Sensor

Tan

Tay³

2005 IEEE Instrumentationand Measurement Technology Conference Proceedings

View full text Add to dashboard Cite

In the design of micro pressure sensors, the deflections of diaphragms are crucial to conduct performance simulations. This paper discuss two cases of diaphragm deformation in a three plates capacitive pressure sensor: a clamped edge diaphragm under uniform load and a cantilever plate deflects in touch mode operation. Analytical models are proposed to provide a quick estimation of the sensors. Evaluation of these models have been done by comparing the results to that of the finite-element method (FEM).

show abstract

Section: Top Plate Deformationmentioning

confidence: 99%