Modeling and optimal design of multilayer thermal cantilever microactuators

Fu, Jianyu; Chen, Dapeng; Ye, Tianchun; Jiao, BinBin; Ou, Yun

doi:10.1007/s11431-008-0340-1

Cited by 7 publications

(9 citation statements)

References 10 publications

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“…[17] Ref. [ In the computation, the DNA parameters are taken as [26] N n = 25 nt, a n = 0.34, η = 0.12 chain/nm 2 , where N n is the nucleotide number, a n is the nucleotide length, and η is the packing density; the substrate parameters are taken as…”

Section: Our Model Numerical Resultsmentioning

confidence: 99%

“…According to the microbeam experiments in Ref. [26], the substrate is considered as an asymmetric three-layer laminated beam with the length of l and the width of b. The materials of three layers are taken as SiN 4 , Cr, and Au with E si and h si (i = 1, 2, 3) representing the elastic modulus and thickness of each layer, respectively.…”

Section: Mathematical Modelmentioning

confidence: 99%

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Clamped-end effect on static detection signals of DNA-microcantilever

Zhang

2021

Appl. Math. Mech.-Engl. Ed.

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Boundary constraint induced inhomogeneous effects are important for mechanical responses of nano/micro-devices. For microcantilever sensors, the clamped-end constraint induced inhomogeneous effect of static deformation, so called the clamped-end effect, has great influence on the detection signals. This paper is devoted to developing an alternative mechanical model to characterize the clamped-end effect on the static detection signals of the DNA-microcantilever. Different from the previous concentrated load models, the DNA adsorption is taken as an equivalent uniformly distributed tangential load on the substrate upper surface, which exactly satisfies the zero force boundary condition at the free-end. Thereout, a variable coefficient differential governing equation describing the non-uniform deformation of the DNA-microcantilever induced by the clamped-end constraint is established by using the principle of minimum potential energy. By reducing the order of the governing equation, the analytical solutions of the curvature distribution and static bending deflection are obtained. By comparing with the previous approximate surface stress models, the clamped-end effect on the static deflection signals is discussed, and the importance of the neutral axis shift effect is also illustrated for the asymmetric laminated microcantilever.

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Section: Our Model Numerical Resultsmentioning

confidence: 99%

Section: Mathematical Modelmentioning

confidence: 99%

Clamped-end effect on static detection signals of DNA-microcantilever

Zhang

2021

Appl. Math. Mech.-Engl. Ed.

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“…Various theoretical approaches for the strain induced by thermal actuation have already been investigated [ 22 , 23 , 24 ]. In most theoretical models, the effects of thickness and thermal resistance between layers are neglected, and the strains at the interface of each adjacent layer are assumed to be equal.…”

Section: Theoretical Modeling Of Bending Characteristicsmentioning

confidence: 99%

“…Besides these examples, there are numerous investigations that include numerical approaches. In these studies, along with 3D numerical simulations using commercial solvers such as ANSYS, simple theoretical calculations based on commercial mathematical software such as MATLAB have successfully been made, owing to the 1D response characteristics of the microcantilevers [ 15 , 16 , 17 , 18 , 19 , 20 , 21 , 22 , 23 , 24 ].…”

Section: Introductionmentioning

confidence: 99%

Design and Electro-Thermo-Mechanical Behavior Analysis of Au/Si3N4 Bimorph Microcantilevers for Static Mode Sensing

Kang

Fragala²,

Kim

et al. 2017

Sensors

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This paper presents a design optimization method based on theoretical analysis and numerical calculations, using a commercial multi-physics solver (e.g., ANSYS and ESI CFD-ACE+), for a 3D continuous model, to analyze the bending characteristics of an electrically heated bimorph microcantilever. The results from the theoretical calculation and numerical analysis are compared with those measured using a CCD camera and magnification lenses for a chip level microcantilever array fabricated in this study. The bimorph microcantilevers are thermally actuated by joule heating generated by a 0.4 μm thin-film Au heater deposited on 0.6 μm Si3N4 microcantilevers. The initial deflections caused by residual stress resulting from the thermal bonding of two metallic layers with different coefficients of thermal expansion (CTEs) are additionally considered, to find the exact deflected position. The numerically calculated total deflections caused by electrical actuation show differences of 10%, on average, with experimental measurements in the operating current region (i.e., ~25 mA) to prevent deterioration by overheating. Bimorph microcantilevers are promising components for use in various MEMS (Micro-Electro-Mechanical System) sensing applications, and their deflection characteristics in static mode sensing are essential for detecting changes in thermal stress on the surface of microcantilevers.

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“…Once the temperature is obtained, the deflection of cantilever can be calculated according to the multilayer deflection model [12]. Figure 3 demonstrates the temperature distribution and deflection of cantilever profiles by the electro-thermal-mechanical model when it is operated at 5.5 mA at room temperature (300 K).…”

Section: Electro-thermal-mechanical Modelmentioning

confidence: 99%

Study on electrothermally actuated cantilever array for nanolithography

Chen

2010

Sci. China Technol. Sci.

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Nanolithography is a patterning technique for the fabrication of nano-scale structures. A promising method of nanolithography known as scanning probe lithography has particularly extensive applications for its high resolution, high reliability, and simple operation. In this paper, a novel electrothermally actuated cantilever with integrated heater, thermal conductor and actuator for scanning probe lithography is proposed. Cantilevers are designed in an 8×4 array. Analytical models are presented to simulate the temperature distribution, deflection and thermal crosstalk of the cantilever array. This structure is successfully fabricated. It is demonstrated that this structure can produce a tip deflection of 16.9 μm at an actuation current of 5.5 mA and the thermal crosstalk between the cantilevers is neglected. nanolithography, scanning probe lithography, electrothermal actuation Citation:Fu J Y, Chen D P, Ye T C. Study on electrothermally actuated cantilever array for nanolithography.

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Modeling and optimal design of multilayer thermal cantilever microactuators

Cited by 7 publications

References 10 publications

Clamped-end effect on static detection signals of DNA-microcantilever

Clamped-end effect on static detection signals of DNA-microcantilever

Design and Electro-Thermo-Mechanical Behavior Analysis of Au/Si3N4 Bimorph Microcantilevers for Static Mode Sensing

Study on electrothermally actuated cantilever array for nanolithography

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