Modeling and performance analysis of cluster tools using Petri nets

Srinivasan, R.

doi:10.1109/66.705374

Cited by 76 publications

(33 citation statements)

References 11 publications

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“…It is easy to trace all the possible states of the PVD cluster tool when wafers are processed in the tool. The Petri model can be verified with the analysis of its reachability, liveness, safeness, and so forth (Srinivasan, 1998). Mathematically, it can be proved that the process flow Petri net in Fig.…”

Section: Design Of Automation and Cim Systemsmentioning

confidence: 98%

Automation and Integration in Semiconductor Manufacturing

Liao¹

2010

Semiconductor Technologies

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Section: Design Of Automation and Cim Systemsmentioning

confidence: 98%

Automation and Integration in Semiconductor Manufacturing

Liao¹

2010

Semiconductor Technologies

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“…They also identify conditions when the tool operation is constrained by the wafer handler. Srinivasan (1998) presents more detailed Petri net models for sequential tools and parallel tools and uses these to determine the steady state behavior of the tool. Lopez & Wood (1996) compare two systems of cluster tools, (1) a series of tools that have multiple parallel modules and (2) a set of sequential cluster tools.…”

Section: Prior Workmentioning

confidence: 99%

Evaluating the impact of process changes on cluster tool performance

Herrmann

Chandrasekaran

Conaghan

et al. 2000

IEEE Trans. Semicond. Manufact.

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ISR develops, applies and teaches advanced methodologies of design and analysis to solve complex, hierarchical, heterogeneous and dynamic problems of engineering technology and systems for industry and government. ISR is a permanent institute of the University of Maryland ABSTRACTCluster tools are highly integrated machines that can perform a sequence of semiconductor manufacturing processes. Their integrated nature can complicate analysis when evaluating how process changes affect the overall tool performance. This paper presents two integrated models for understanding cluster tool behavior. The first model is a network model that evaluates the total lot processing time for a given sequence of activities. By including a manufacturing process model (in the form of a response surface model, or RSM), the model calculates the total lot processing time as a function of the process parameter values and other operation times. This model allows one to quantify the sensitivity of total lot processing time with respect to process parameters and times.In addition, we present an integrated simulation model that includes a process model. For a given scheduling rule that the cluster tool uses to sequence wafer movements, one can use the simulation to evaluate the impact of process changes including changes to product characteristics and changes to process parameter values. In addition, one can construct an integrated network model to quantify the sensitivity of total lot processing time with respect to process times and process parameters in a specific scenario.The examples presented here illustrate the types of insights that one can gain from using such methods. Namely, the total lot processing time is a function not simply of each operation's process time, but specifically of the chosen process parameter values. Modifying the process parameter values may have significant impacts on the manufacturing system performance, a consequence of importance which is not readily obvious to a process engineer when tuning a process (though in some cases, reducing process times may not change the total lot processing time much). Additionally, since the cluster tool's maximum throughput depends upon the process parameters, the tradeoffs between process performance and throughput should be considered when evaluating potential process changes and their manufacturing impact .2

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“…In this work, the simulation provided less than 5% error results as compared to the actual data. Srinivasan [12] proposed the modeling and performance analysis of a cluster tool using the Petri net. Two configurations, including the single-end effector robot (SEER) and the dual-end effector robot (DEER), were discussed based on the parallel and sequential processes.…”

Section: Introductionmentioning

confidence: 99%

Dispatching of overhead hoist vehicles in a fab intrabay using a multimission-oriented controller

Chen

Huang

2005

Int J Adv Manuf Technol

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The semiconductor manufacturing system has become one of the most important manufacturing systems in recent years. Intrabay automation for wafer transport is in high demand in a 300 mm foundry fab. The control of the transport system plays an important roles in manufacturing efficiency and the satisfaction of production strategy. In general, efficiency is the most important issue that has appeared in most research of automated transport systems. However, how to dynamically adjust the transport policy to meet the production strategy and to increase the transport efficiency as well seems to be more crucial to modern semiconductor manufacturing systems. In this paper, a fuzzy-logic-based multimission-oriented overhead vehicle dispatcher is developed. The vehicle dispatching rule is assigned in real-time according to the statistics of the manufacturing performance. In this manner, the dispatching rules can be adjusted according to possible high-risk lots so that most of the production strategies can be satisfied. If all of the lots meet the prescribed production strategies, then the nearest-job-first rule can be used to offer higher transport efficiency. In addition, the proposed vehicle dispatcher is also capable of deadlock-free operation, collision avoidance, and blockage prevention. Finally, this paper uses AutoMod simulation software to construct and evaluate the manufacturing models. By evaluating the simulation results, the proposed intelligent multimission-oriented vehicle dispatcher performs better performance than the others, and all of the production strategies are satisfied.

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Modeling and performance analysis of cluster tools using Petri nets

Cited by 76 publications

References 11 publications

Automation and Integration in Semiconductor Manufacturing

Automation and Integration in Semiconductor Manufacturing

Evaluating the impact of process changes on cluster tool performance

Dispatching of overhead hoist vehicles in a fab intrabay using a multimission-oriented controller

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