The titanium alloy open integral micro impeller has a strong material strength and high removal rate in the field of multi-axis CNC machining. The flow channel is tiny and the blades are thin and highly twisted. It is difficult to control the surface accuracy and prone to overcutting and undercutting. The NX2212 software post-processing module plans two distinct blade finishing process routes and verifies them using virtual machine tool simulation, taking into account the technical challenges of micro impeller machining. Following verification, the tool path machining code is imported into MATLAB for data fitting. The workpiece surface working condition is determined based on the simulation findings, the blade surface roughness value is calculated, and a physical simulation model of blade finishing is created in the finite element analysis software. The outcomes demonstrate how well the “segmented and sub-regional cutting” processing method may raise blade accuracy. The leading and trailing edges of the blade both had surface roughness increases of 4.86% and 4.19%. The surface morphology of the micro impeller is measured using a white light interferometer, and it is CNC machined using two distinct process methods. The findings demonstrate that there is a significant difference between the value calculated by the finite element analysis software and the surface roughness value measured experimentally which together make up less than 5%. An investigation of the impact of cutting parameters on the surface roughness of micro-structure components is carried out using a three factor, three-level BBD experiment that is founded on the second-order response surface method. The findings indicate that the feed per tooth influences surface roughness more significantly than cutting depth and cutting speed for a reasonable range of cutting parameters; Surface roughness will rise with lower or higher cutting speeds; Raising the feed per tooth and the cutting speed simultaneously may reduce surface roughness; Surface roughness can be accurately predicted and controlled using the second-order response surface method.