MOEMS and Miniaturized Systems IV 2004
DOI: 10.1117/12.524853
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Modeling and simulation of fiber image guide multichip modules for MOEMS applications

Abstract: Densely integrated systems in the future will incorporate device and communication technologies that span the domains of digital and analog electronics, optics, micro-mechanics, and micro-fluidics. Given the fundamental differences in substrate materials, feature scale and processing requirements between integrated devices in these domains, it is likely that multi-chip, system-in-package, integration solutions will be required for the foreseeable future. The multi-domain nature of these systems necessitates de… Show more

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