Modeling and Testing of the Static Deflections of Circular Piezoelectric Unimorph Actuators

Abstract

In this article, based on the classical laminated plate theory, a new static deflection model for CPUAs subjected to voltage is established and the bonding layer is taken into account as an individual layer. According to the established analytical model, the influences of the structural parameters and material properties of the CPUA on the transverse deflection are numerically simulated and the static and dynamic characteristics of the CPUA are experimentally tested. The research results show that the predicted static deflections of the CPUA by the established deflection model in this article agree well with the measured results, the established static deflection model considering the bonding layer is more accurate than the existing model neglecting the bonding layer, and the maximum relative error is reduced by 8.45%. The static deflections of the CPUA are apparently affected by the structural parameters and the material properties, which indicate that the performance of the CPUA can be optimized by the structural parameters and material properties. Because the hysteresis of the piezoelectric material is not considered when establishing the static deflection model, the apparent error exists when utilizing the static deflection model to predict the dynamic characteristics of the CPUA.

Analytical modeling, simulations and experimental studies of a PZT actuated planar valveless PDMS micropump

“…It is observed that the relationship between the flow rate and the back pressure is linear, as expected. Previous studies on valveless pumps [13,20] showed that the pump performance in the form of flow rate versus pressure is very close to a linear line. The results provide the limits of performance in terms of maximum flow rate (20 L/min) at zero back pressure and maximum back pressure (220 Pa) at zero flow rate.…”

“…A peristaltic micropump design with shape memory alloy as the actuator was presented by Sassa et al [18]. The mechanism of diaphragm vibration with piezoelectric actuators has been explained by Mo et al [19] and Wang et al [20]. The deflection of a circular diaphragm in case of a PZT actuator having smaller diameter than the diaphragm was discussed.…”

“…From the literature review, it is clear that experimental investigations of PZT actuated valveless micropumps including microfabrication and experiments have been reported by various research groups in the past few years [11][12][13][14][15][16][17][18][19][20][21]. Also, many approximate analytical and simulation models have been reported [22][23][24][25][26][27][28][29][30][31][32][33].…”

Modeling and experimental verification of the flow characteristics of an active controlled microfluidic valve with annular boundary

“…When the pressure difference between the inlet and the outlet of the ACMV is not large, for example, the maximum pressure difference is only a few thousand pascals, the impact of the inlet fluid to deformation of the CPUA with the applied voltage of about 100 V can be ignored. To improve the accuracy of the model, taking into account the impact of the adhesive layer on the deflection of the CPUA as shown in Figure 5, we use the transverse deflection model for the partially covered CPUA with the clamped edge (Wang and Huo, 2010), which can be expressed as…”

Principle and structure of a printed circuit board process–based piezoelectric microfluidic pump integrated into printed circuit board

“…In previous works, Pan and Wang (2016) developed an active piezoelectric microfluidic valve with annular boundary and established an active control flow model based on a deflection mathematical model of partially covered circular piezoelectric unimorph actuator (CPUA) for the clamped support condition under voltage control (Wang and Huo, 2010). Based on this, the principle and structure of a PCB process-based microfluidic pump integrated into PCB are proposed and realized in this article.…”