Modeling, fabrication, and testing of a MEMS multichannel aln transducer for a completely implantable cochelar implant

Zhao, Chuming; Knisely, Katherine E.; Grosh, Karl

doi:10.1109/transducers.2017.7993976

Cited by 9 publications

(6 citation statements)

References 14 publications

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“…Zhao et al demonstrated a different approach by developing an AlN piezoelectric intracochlear acoustic transducer that consists of an array of 4 cantilever beams. The implanted transducer in a guinea pig cochlea can generate up to 79.7 µV under 95 dB SPL in a wide frequency range [25]. The problem of this distinctive method is generated low output voltage.…”

Section: Transducer and Energy Harvester Low Power Interface Circuits Flexible Substratementioning

confidence: 99%

Thin-Film PZT-Based Multi-Channel Acoustic MEMS Transducer for Cochlear Implant Applications

2022

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This paper presents a multi-channel acoustic transducer that works within the audible frequency range (250-5500 Hz) and mimics the operation of the cochlea by filtering incoming sound. The transducer is composed of eight thin film piezoelectric cantilever beams with different resonance frequencies. The transducer is well suited to be implanted in middle ear cavity with an active volume of 5 mm × 5 mm × 0.62 mm and mass of 4.8 mg. Resonance frequencies and piezoelectric outputs of the beams are modeled with Finite Element Method (FEM). Vibration experiments showed that the transducer is capable of generating up to 139.36 mVpp under 0.1 g excitation. Test results are consistent with the FEM model on frequency (97%) and output voltage (89%) values. Device was further tested with acoustic excitation on an artificial tympanic membrane and flexible substrate. Under acoustic excitation, 50.7 mVpp output voltage generated under 100 dB Sound Pressure Level (SPL). Output voltages observed in acoustical and mechanical characterizations are the highest values reported to the best of our knowledge. Finally, to assess the feasibility of the transducer in daily sound levels, it was excited with a speech sample and output signal was recovered. Time-domain waveforms of the recorded and recovered signals showed close patterns.

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Section: Transducer and Energy Harvester Low Power Interface Circuits Flexible Substratementioning

confidence: 99%

Thin-Film PZT-Based Multi-Channel Acoustic MEMS Transducer for Cochlear Implant Applications

2022

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“…Based on the voltage waveform and current waveform, the coil impedance is solved. The impedance consists of inductance and resistance, which is shown in Equation (2). Figure 4 demonstrates the inductance and resistance change in terms of frequency.…”

Section: Electromagnetic Analysismentioning

confidence: 99%

“…Nowadays, earphones are inseparable companions of multimedia devices such as mobile phones, notebook computers, video recorders, dictation devices, personal digital assistants, MP4 players, and personal music systems. The acoustic transducers generally used in these earphones include microelectromechanical system (MEMS) receivers [1,2], dynamic receivers [3], and balanced-armature (BA) receivers [4,5]. In this work, the BA receiver and dynamic receiver were combined in a hybrid earphone to improve the sound pressure level (SPL) over a wide range.…”

Section: Introductionmentioning

confidence: 99%

Analysis and Development of Hybrid Earphone Combining Balanced-Armature and Dynamic Receivers

Jiang

et al. 2019

Applied Sciences

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With the rapid progress in the development of multimedia devices, earphones have become increasingly important as audio output tools. Hybrid earphones combining balanced-armature (BA) and dynamic receivers can produce better performance over a wider range when compared to the earphones with BA receiver alone (BA earphones) or dynamic receiver alone (dynamic earphones). BA and dynamic earphones are multi-physics products that exhibit coupling between the electromagnetic, mechanical, and acoustic domains. In this study, an analysis tool is developed to design a hybrid earphone based on the conventional BA and dynamic earphones. Using the developed analysis tool, an acoustic tube is optimized to match the earphone target curve and obtain improved sound quality. A prototype is manufactured and tested, and the experimental results verify the feasibility and effectiveness of the developed analysis tool. The root-mean-square value of the sound pressure level (SPL) deviation of the hybrid earphone with the optimized acoustic tube is 4.60, whereas those for the dynamic and BA earphones are 8.94 and 6.04, respectively. Thus, it is verified that the frequency response is improved using the hybrid earphone developed herein.

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“…Inspired by the cochlear characteristics, various vibration sensors, microphones, flow sensors, artificial hair cells (AHCs), and artificial cochleae have been designed (Guerreiro et al, 2017; Knisely, 2017; Shintaku et al, 2010). Among these, the development of artificial cochleae and AHCs with the purpose of creating novel cochlear implants and treating sensorineural hearing loss caused by damage to the hair cells (Robles and Ruggero, 2001) has gained traction in recent years (Davaria and Tarazaga, 2022; Davaria et al, 2020; Joyce and Tarazaga, 2015b; Zhao et al, 2017). Two approaches are popular in modeling the cochlea: (i) physical models of the cochlea consisting of fluid-filled compartments and a trapezoidal membrane representing the BM (Chen et al, 2006; Tsuji et al, 2019; White and Grosh, 2005), and (ii) arrays of cantilevered or fixed-fixed beams with various length working near the first natural frequency of each beam (Davaria and Tarazaga, 2017; Song et al, 2015; Zhao et al, 2018, 2019).…”

Section: Introductionmentioning

confidence: 99%

Self-sensing active artificial hair cells inspired by the cochlear amplifier, Part I: Theoretical and numerical realization

Davaria

Tarazaga

2022

Journal of Intelligent Material Systems and Structures

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The mammalian cochlear amplifier displays a unique nonlinear characteristic of amplifying or compressing the acoustic stimuli based on their level. Designing control algorithms for artificial hair cells (AHCs) with active sensing capabilities could mimic such dynamics. The present work focuses on developing a novel self-sensing active AHC scheme that implements the amplification/compression function of the AHCs and extends the authors’ previous designs for future cochlear implants or sensor design applications. The AHC functions near a Hopf bifurcation and varies the output piezoelectric voltage by a power-law relationship with the input. It is the first time that a self-sensing AHC is modeled as a quadmorph cantilever controlled by a phenomenological cubic damping controller. The AHC’s control signal is supplied to a pair of its piezoelectric layers and the output of the AHC is the sensed voltage of the second piezoelectric pair. This is in contrast to the previous studies where the AHC’s tip-velocity was measured with external sensors. The requirement of permanent external sensors in the system was a strict limitation that is eliminated in this work. An in-depth study of this novel AHC is conducted in this paper and AHC’s implementation is examined experimentally in Part II of the paper.

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Modeling, fabrication, and testing of a MEMS multichannel aln transducer for a completely implantable cochelar implant

Cited by 9 publications

References 14 publications

Thin-Film PZT-Based Multi-Channel Acoustic MEMS Transducer for Cochlear Implant Applications

Thin-Film PZT-Based Multi-Channel Acoustic MEMS Transducer for Cochlear Implant Applications

Analysis and Development of Hybrid Earphone Combining Balanced-Armature and Dynamic Receivers

Self-sensing active artificial hair cells inspired by the cochlear amplifier, Part I: Theoretical and numerical realization

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