Modeling of a continuous physical vapor deposition process: Mass transfer limitations by evaporation rate and sonic choking

Vesper, J. Elin; Obiji, Chibuikem S.; Westerwaal, R.J.; Boelsma, Christiaan; Kenjereš, Saša; Kleijn, Chris R.

doi:10.1016/j.applthermaleng.2021.117099

Cited by 4 publications

(2 citation statements)

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“…A sufficient evaporation rate for coatings is typically reached via a thermal source, 15 whereas maintenance is reduced by avoiding stray deposition using plumes (or jets) directed toward the substrate emerging from multiple closely spaced nozzles or slots. 16,17 In these plume clusters, the initially free expansion interacts with neighboring plumes producing shocks. 18 This causes mass flow nonuniformities, which are especially undesirable in thin-film deposition.…”

Section: Introductionmentioning

confidence: 99%

Diffusive separation in rarefied plume interaction

Vesper

Kenjereš

Kleijn

2022

Journal of Vacuum Science &Amp; Technology B

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In the present study, we propose the use of a light, inert carrier gas to support deposition uniformity and rate in continuous physical vapor deposition, in which closely spaced slots or nozzles are required to achieve a sufficiently high deposition rate. Interaction shocks between the emerging rarefied plumes cause undesired nonuniformities in the deposited coating. The present work evaluates the effect of adding a carrier gas on the interaction shock. We study the interaction between two sonic plumes consisting of a binary mixture, i.e., silver as coating material and helium as a light inert carrier gas, by direct simulation Monte Carlo. While the inlet Mach and Knudsen numbers were kept constant, the fraction of carrier gas was varied to single out the effect of species separation. The influence of rarefaction on species separation was also studied. Species separation produces a high carrier-gas fraction in the periphery and an accumulation of the heavier species in the jet core. The resulting change in the speed of sound alters the local expansion characteristics and, thus, shifts the shock location and weakens the shock. These phenomena intensify with the degree of rarefaction. It is shown that adding a light carrier gas increases deposition rate may enhance uniformity and reduce stray deposition.

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Section: Introductionmentioning

confidence: 99%

Diffusive separation in rarefied plume interaction

Vesper

Kenjereš

Kleijn

2022

Journal of Vacuum Science &Amp; Technology B

Self Cite

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show abstract

“…2 Recently, clusters of sonic zinc vapor plumes have been introduced as a novel technology to achieve a continuous physical vapor deposition (PVD) apparatus for galvanizing steel. 3,4 For all these technologies, the fluxes from the plumes are of importance. Shuttle orbiters operate next to space stations; the momentum flux and the heat flux from the exhaust plumes may cause damage when impinging on any sensitive structures, such as solar panels or optically sensitive components.…”

Section: Introductionmentioning

confidence: 99%