Modeling of a micro-cantilevered piezo-actuator considering the buffer layer and electrodes

Abstract

Considering the buffer layer and electrodes, we set up a piezoelectric multilayered cantilever model to evaluate the dynamic performance of the micro-cantilevered piezo-actuator (MCPA) based on Euler-Bernoulli beam theory without considering the residual stresses on the MCPA. Adopting the material and geometric parameters of the previous MCPAs with the different lengths, the first-mode resonance frequency-beam length, the tip deflection-voltage and harmonic response curves are simulated by using the traditional and proposed models, and the results based on the proposed model are much closer to the experimental and finite element simulation results than those based on the traditional model, indicating that the proposed model is valid for evaluating the actuation performances of the MCPA. The effect of the mechanical damping and bending stiffness on the actuation performance of the MCPA is also discussed. Using the proposed model, the dependences of the first-mode resonance frequency and tip deflection of the MCPA on non-piezoelectric layer thicknesses are analyzed at the certain driving voltage. The above-mentioned methods and conclusions can be used for the structure optimized design and performance improvement of MCPAs.

Effects of Strain Node on the Actuation Performance of Multilayer Cantilevered Piezoactuator with Segmented Electrodes

“…e configurations of the microcantilever conform to the Euler-Bernoulli beam hypothesis, which have been presented in our previous research [10]. Considering viscous air (medium) damping and Kelvin-Voigt (or strain rate) damping, the governing equation of the cantilever beam can be written as [21]…”

“…e different electrode connections are adopted under the different modes of the cantilever beam. At the first mode, the strain distribution is in the same phase for the MCPA, because there is no strain node [10]. Here, the electrode directions in the L 1 and L 1 -L regions are opposite, and the electrode wires are connected in series with the applied voltage, as shown in Figure 1(b).…”

“…Shivashankar and Gopalakrishnan [9] reported a d33 mode surface-bondable multilayer actuator that can provide large braking force and stroke for driving large, thick, and stiffer structures. Peng et al [10] proposed a piezoelectric multilayer actuator considering buffer layers and analyzed the dependence of the resonance frequency at the first mode and tip deflection on different layer thicknesses (buffer layer, electrode layer, and substrate layer). e contributions of the above research mainly focused on the first mode while ignoring the other higher-frequency modes, because the tip deflection of the cantilever beam at higher modes is smaller than the tip deflection at the first mode.…”

Theoretical analysis of a resistance adjusting type piezoelectric cylindrical transducer

“…Similar to the previous works (Brissaud, 2004; Brissaud et al, 2003; Bugdayci et al, 1983; Peng et al, 2012; Wang et al, 2013; Xiang and Shi, 2009; Zhang, 2014; Zhang et al, 2015), the electrode is considered an elastic layer. Thus, for harmonic steady vibration, the mechanical and electrical components can be expressed as (Wang and Shi, 2013, 2016)…”

Modelling and simulation of surface-bonded piezoelectric actuators with bending effects

“…Based on classical beam and plate models, actuator-induced bending and extension of piezoelectric structures have been extensively studied for different geometries and loading conditions (Dimitriadis et al, 1991;Han and Lee, 1998;Mitchell and Reddy, 1995;Reddy, 1999;Tauchert, 1992;Tzou and Tseng, 1991;Wang and Rogers, 1991). In a recent study, a simple beam model has been used to evaluate the response of micro-cantilevered actuators containing the effects of buffer layers and electrodes (Peng et al, 2012).…”