2001
DOI: 10.1063/1.1327607
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Modeling of gate-induced drain leakage current in n-type metal–oxide–semiconductor field effect transistor

Abstract: Articles you may be interested inModel of random telegraph noise in gate-induced drain leakage current of high-k gate dielectric metal-oxidesemiconductor field-effect transistors Appl. Phys. Lett. 100, 033501 (2012); 10.1063/1.3678023 Hot carrier effect on gate-induced drain leakage current in high-k/metal gate n-channel metal-oxidesemiconductor field-effect transistors Appl. Phys. Lett. 99, 012106 (2011); 10.1063/1.3608241 Strain induced changes in the gate leakage current of n-channel metal-oxide-semiconduct… Show more

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Cited by 7 publications
(2 citation statements)
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“…Another important point interesting to evaluate in a NOR-architecture memory array is the BitLine Leakage (BLL), due to the Gate Induced Drain Leakage (GIDL) current in Band-to-Band Tunneling (BBT) regime, during the CHE programming operation [15]. As highlighted in previous studies [16][17][18], several technological parameters, such as cell LDD doping (dose, tilt, and energy), drain-gate overlap, or STI shape have an impact on electric fields in the drain-bulk junction, responsible for GIDL. In this section, the impact of arsenic LDD implantation energy on bitline leakage measurements is presented through electrical characterizations, performed on a -dummy cell‖ structure.…”
Section: Bitline Leakage Optimizationmentioning
confidence: 97%
“…Another important point interesting to evaluate in a NOR-architecture memory array is the BitLine Leakage (BLL), due to the Gate Induced Drain Leakage (GIDL) current in Band-to-Band Tunneling (BBT) regime, during the CHE programming operation [15]. As highlighted in previous studies [16][17][18], several technological parameters, such as cell LDD doping (dose, tilt, and energy), drain-gate overlap, or STI shape have an impact on electric fields in the drain-bulk junction, responsible for GIDL. In this section, the impact of arsenic LDD implantation energy on bitline leakage measurements is presented through electrical characterizations, performed on a -dummy cell‖ structure.…”
Section: Bitline Leakage Optimizationmentioning
confidence: 97%
“…The presence of the gateinduced high electric field entails the overlap of the silicon energy bands and breeds the emission of minority carriers, which will be in transit, because of the BBT effect, from the valence band to the conduction band of silicon. The electrons emitted at the surface of the deep depletion region layer are collected by the drain and moved towards the substrate under the transverse electric field giving, therefore, a leakage current that is described by [16]:…”
Section: Gate-induced Drain Leakage Currentmentioning
confidence: 99%