Modeling of Photoinduced Deformation in Silicon Microcantilever

Guo, Yulin; Zhou, Jia; Huang, Yiping; Bao, Min Hang

doi:10.3390/s7091713

Cited by 13 publications

(20 citation statements)

References 10 publications

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“…(10) is used, tip deflection of the unimorph found via Eq. (26) correlates with that derived by Guo et al (2007) for the silicon microcantilever. As Eq.…”

supporting

confidence: 70%

“…In this case, the photo-induced strain decreases with the light penetration depth exponentially, which is the same as that discussed in Warner and Mahadevan (2004), Guo et al (2007) and Luo and Tong (2009). To apply Eq.…”

Section: Phenomenological Modeling Of Plzt Actuators Novel Formulatisupporting

confidence: 60%

“…This photo-induced strain in 0-3 polarized PLZT actuators is different from that in PLZT actuators with 0-1 polarization, electrically-induced strain in PZT materials and the thermal expansion as the strains in these cases are uniform through the thickness normally. It is also different from the photo-induced strain in elastomer (Warner and Mahadevan, 2004) and in silicon (Guo et al, 2007). In the investigation of Warner and Mahadevan (2004) or Guo et al (2007), the photo-induced strain linearly depends on the light intensity and exponentially decreases with the light penetration depth when the light intensity attenuates by Beer's law.…”

Section: Phenomenological Modeling Of Plzt Actuators Novel Formulatimentioning

confidence: 94%

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Constitutive equations for 0-3 polarized PLZT actuators

Luo

Tong

2009

International Journal of Solids and Structures

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a b s t r a c tThis article presents constitutive equations of transparent lead lanthanum zirconate titanate (PLZT) materials poling along thickness direction or with 0-3 polarization. Discussed first are the Beer's law of light transmission in transparent solid and the photovoltaic current density in PLZT materials. Formulas for field strength and electrical potential between two electrodes of a PLZT wafer are then derived from the basic photovoltaic equations. By superposing the photovoltaic and the converse piezoelectric effects, we formulate a novel expression for photo-induced strain that is nonlinearly dependent of incident light intensity and varies with light penetration depth in through-thickness direction. On the basis of the derived photo-induced strain, linear and nonlinear constitutive equations of 0-3 polarized PLZT actuators are formulated. The present model is validated by using the available experimental data in the literature. By using the present model with an exponential variation of strain through the thickness, closed-form solutions for the equivalent loads acting on a PLZT unimorph, bimorph and intelligent beam are obtained and then compared with numerical results available in the literature.

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“…(10) is used, tip deflection of the unimorph found via Eq. (26) correlates with that derived by Guo et al (2007) for the silicon microcantilever. As Eq.…”

supporting

confidence: 70%

Section: Phenomenological Modeling Of Plzt Actuators Novel Formulatisupporting

confidence: 60%

Section: Phenomenological Modeling Of Plzt Actuators Novel Formulatimentioning

confidence: 94%

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Constitutive equations for 0-3 polarized PLZT actuators

Luo

Tong

2009

International Journal of Solids and Structures

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“…However, the photo-induced strain in photostrictive materials decreases with light penetration depth as light intensity decays with the depth (Warner and Mahadevan, 2004;Guo et al, 2007) depending on the material's transparency and can also have anisotropic features due to light polarization (Yu et al, 2003;Jiang et al, 2006).…”

Section: Introduction P Hotostrictive Materials Have Attracted An Incmentioning

confidence: 99%

Constitutive Modeling of Photostrictive Materials and Design Optimization of Microcantilevers

Luo

Tong

2009

Journal of Intelligent Material Systems and Structures

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This article presents constitutive models for photo-induced strains in photostrictive materials and an optimal design of microcantilevers driven by light illumination. Behaviors of photo-induced strains in semiconductors and polymeric materials are reviewed first, and then new phenomenological constitutive models are developed that depict two distinctive features of photo-induced strain profile: (a) dependence on variation of light intensity which decreases with the depth measured from the illuminated surface due to light attenuation and energy absorption; and (b) anisotropy or dependence on direction of light polarization. On the basis of the constitutive modeling of photo-induced strain in wafers, design optimization of microcantilevers is then investigated for both geometrically linear and non-linear deformations.

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“…With the realization of micro-sized semiconductor suspended structures, such as beams and cantilevers, made possible by MEMS-based technology, photostriction was readily demonstrated as an effective mechanism for achieving mechanical movement in such structures [11]- [13]. Datskos et al studied photostriction extensively and also applied it to photo-detection [12], [16], whilst Guo et al developed a model consistent with the experimental results of Datskos et al [17]. In these works, the photo-induced carrier density and spatial distribution was estimated from the intensity and energy of the incident light employed, and by assuming minority carrier lifetime values reported in the literature.…”

mentioning

confidence: 85%

Characterization and Modeling of Photostriction in Silicon Cantilevers Fabricated on Silicon-on-Insulator Substrates

Chenniappan

Umana‐Membreno

Silva

et al. 2015

J. Microelectromech. Syst.

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Photostriction-based all-optical actuation of silicon microcantilevers has been investigated through experimental characterization of structures fabricated on silicon-on-insulator substrates, and through numerical modeling and analysis of their semiconductor device and micromechanical characteristics. Since the pressure coefficient of the bandgap is negative in Si, photostriction-induced photoactuation in Si-based cantilevers was evident as upward mechanical defections (away from the substrate) in response to pulsed laser illumination on the cantilevers' top surface, which is in contrast to the downward deflections typical of photothermal effects. For the numerical modeling of photostriction induced effects, carrier lifetime and excess-carrier concentrations were determined from transient photoconductance measurements. The experimentally determined parameters were then employed to simulate carrier-density profiles across the modeled structure. The modeled cantilever deflections were found to be in excellent agreement with experimentally determined deflections. It is also shown that 100-µm-long Si cantilevers were deflected by up to 10 nm, and generated a force of 0.14 nN, when optically actuated by a 405-nm laser power density of 400 W/cm 2 .[2013-0348]

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Modeling of Photoinduced Deformation in Silicon Microcantilever

Cited by 13 publications

References 10 publications

Constitutive equations for 0-3 polarized PLZT actuators

Constitutive equations for 0-3 polarized PLZT actuators

Constitutive Modeling of Photostrictive Materials and Design Optimization of Microcantilevers

Characterization and Modeling of Photostriction in Silicon Cantilevers Fabricated on Silicon-on-Insulator Substrates

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