Modeling of Small-Sized Acoustic Particle Velocity Horn for MEMS Thermal Acoustic Particle Velocity Sensor

Chang, Wen-Han; Yang, Lingmeng; Zhu, Zhezheng; Yang, Zhenchuan; Gao, Chengchen

doi:10.1109/mems51782.2021.9375337

Cited by 4 publications

(2 citation statements)

References 6 publications

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“…As shown in figure 6, we design a series of sensing wires parallel to the heating wire to measure the stationary temperature distribution. The fabrication process of this device is the same as the AVS [25]. The spacing between the sensing wire and the heating wire is 10 µm, 20 µm, 40 µm, 70 µm, 100 µm, 200 µm, 350 µm and 500 µm.…”

Section: Comparison With Experimental Resultsmentioning

confidence: 99%

An analytical model of three-hot-wire acoustic particle velocity sensors

Zhu

Chen

Yang

et al. 2023

J. Micromech. Microeng.

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A thermal based acoustic vector sensor consisting of three heated wires can detect the acoustic particle velocity instead of pressure. This paper proposes an analytical model for calculating the temperature distribution and acoustic caused temperature perturbation of the sensor with three-hot-wire configuration. In this model, the nonlinear effect caused by nonuniform thermal conductivity is considered. The nonlinear effects will not only affect the temperature of three hot wires, but also the frequency response of the sensor. According to the stationary temperature distribution calculated by nonlinear model, we correct the heat diffusion coefficient in acoustic perturbation model. The nonlinear stationary model and corrected perturbation model are found to be in good agreement with numerical results.What’s more, we design a chip to measure the temperature distribution of three heated wires and compare the sensitivity of the sensor with corrected model. The experimental results can verify the proposed model. This study provides a theoretical basis for sensor performance optimization.

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Section: Comparison With Experimental Resultsmentioning

confidence: 99%

An analytical model of three-hot-wire acoustic particle velocity sensors

Zhu

Chen

Yang

et al. 2023

J. Micromech. Microeng.

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“…As for MEMS-based TAPVS, acoustic horns should be scaled down to a smaller size, where the boundary layer effect is no longer neglectable and the assumptions of the Webster’s horn equation may also be invalid. To address this problem, a correction model for the small-sized double cone (DC) horn with the consideration of the boundary layer effect was proposed and experimentally verified in our previous work [ 36 ], which can give more accurate velocity gain amplification factors at the narrow horn throat than the traditional DC horn model [ 33 ]. Although such a model can give us insights to the horn design, it has limitations for exploring more complicated horn structures.…”

Section: Introductionmentioning

confidence: 99%

Design and Optimization of Sensitivity Enhancement Package for MEMS-Based Thermal Acoustic Particle Velocity Sensor

Chang

Yang

Zhu

et al. 2021

Sensors

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In this paper, small-sized acoustic horns, the sensitivity enhancement package for the MEMS-based thermal acoustic particle velocity sensor, have been designed and optimized. Four kinds of acoustic horns, including tube horn, double cone horn, double paradox horn, and exponential horn, were analyzed through numerical calculation. Considering both the amplification factor and effective length of amplification zone, a small-sized double cone horn with middle tube is designed and further optimized. A three-wire thermal acoustic particle velocity sensor was fabricated and packaged in the 3D printed double cone tube (DCT) horn. Experiment results show that an amplification factor of 6.63 at 600 Hz and 6.93 at 1 kHz was achieved. A good 8-shape directivity pattern was also obtained for the optimized DCT horn with the lateral inhibition ratio of 50.3 dB. No additional noise was introduced, demonstrating the DCT horn’s potential in improving the sensitivity of acoustic particle velocity sensors.

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