Modeling of ta-C growth: Influence of the technological parameters

60 years of DLC coatings: Historical highlights and technical review of cathodic arc processes to synthesize various DLC types, and their evolution for industrial applications

“…The reason for this effect is that the penetration depth of the impinging carbon ions, and the defect growth caused by droplets or substrate impurities, depends not only on the ion energy but also on the incident angle [91,94,95]. This means that geometric considerations and rotation effects in industrial coaters influence non-uniformly the sp 3 content of the deposited films [91].…”

“…Industrially important aspects of coating growth have been discussed, on the basis of a more complex thermal model in which the bonding structure in a-C coatings is determined by the energy of the impinging carbon ions, the angle of incidence, the substrate temperature, and the deposition rate [91]. It has often been observed that the degree of sp 3 C-C bonding increases sharply with the ion energy up to around 100 eV, provided that the substrate temperature remains low enough [5,92].…”

“…the growth temperature, which is also influenced by the ion energy [91][92][93]. It was shown by the analytical growth model that deposition temperatures lower than 400 K are required to obtain the ion energy dependence as described above [91]. [92].…”

Optical Properties of Tetrahedral Amorphous Carbon Films and Their Potential for Lab-on-a-Chip

“…It is well known, that ta-C films can be produced using different PVD-methods like S bend filtered cathodic arc [11]- [13], pulsed laser vacuum arc [4] [9] or pulsed laser deposition (PLD) [14]. PLD has the advantage of low droplet formation in comparison to e.g.…”

“…An increase of the sp 3 -content causes an increase of hardness, elasticity modulus and simultaneously an increase in transparency in the visible and near infrared range (e.g. [5] [7]- [9]). …”