2009
DOI: 10.1016/j.sna.2009.03.002
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Modeling of the fluid-structure interaction in a fluidic sensor cell

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Cited by 21 publications
(8 citation statements)
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“…9b shows a MEMS metallic suspended plate resonator for viscosity sensing of complex low-viscous fluids (Reichel et al 2010(Reichel et al , 2011. Different membrane and immersed resonators, using either Lorentz force or piezo actuation, have been developed for viscosity and density measurements on low-viscous fluids (Reichel et al 2009;Clara et al 2016;Lu et al 2017;Lucklum et al 2011). Other examples include parallel plate and waveguide techniques for probing viscosities > 1 Pa•s (Abdallah et al 2016;Kazys et al 2013).…”
Section: Cantilevers and Resonating Viscometersmentioning
confidence: 99%
“…9b shows a MEMS metallic suspended plate resonator for viscosity sensing of complex low-viscous fluids (Reichel et al 2010(Reichel et al , 2011. Different membrane and immersed resonators, using either Lorentz force or piezo actuation, have been developed for viscosity and density measurements on low-viscous fluids (Reichel et al 2009;Clara et al 2016;Lu et al 2017;Lucklum et al 2011). Other examples include parallel plate and waveguide techniques for probing viscosities > 1 Pa•s (Abdallah et al 2016;Kazys et al 2013).…”
Section: Cantilevers and Resonating Viscometersmentioning
confidence: 99%
“…This smaller gap and a complete revision of the magnetic circuit yield an enhancement of the magnetic flux density from 150 mT to approximately 0.6 T which quadratically improves the sensor's sensitivity [8].…”
Section: Sensor Principlementioning
confidence: 99%
“…4, where the velocity amplitude along the gap distance is shown over the frequency [4]. For resonator modes exhibiting out-of-plane motion, the fluid displacement can be solved by a potential flow and a correction of the tangential components by a shear wave solution (assuming incompressibility) [5].…”
Section: Theory and Numerical Analysismentioning
confidence: 99%