Modeling of the High Frequency Plasma Reactive Synthesis of Titanium Dioxide Nanoparticles

Abstract

High purity spherical nano-powder materials can be synthesized using high-frequency plasma chemical vapor deposition (HF-PCVD) by electrodeless discharge. A generalized two-dimensional mathematical model for the reactive synthesis titanium dioxide (TiO2) nanoparticles using HF-PCVD was developed based on reaction engineering theory, the model can theoretically describe the distribution of temperature and conversion of titanium tetrachloride(TiCl4) reactant in reactor. The model was proved by using experiment conditions. It was reasonable explained by simulation results of the model that why the average particle sizes of TiO2 nanoparticles product is vary in different experiment conditions, that is, at shorter residence time and a lower concentration of TiCl4 reactant, the particle sizes of TiO2 nanoparticles is smaller and more uniform distribution, but a lower conversion rate of TiCl4 reactant，vice versa.