Modeling of Wet Stiction in Microelectromechanical Systems (MEMS)

Hariri, Alireza; Zu, Jean W.; Mrad, Ridha

doi:10.1109/jmems.2007.904349

Cited by 34 publications

(22 citation statements)

References 21 publications

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“…These experimental results confirm the multiple-asperity contact theory: due to the roughness of the contacting surfaces, the contact interaction involves only the highest asperities of the surface topology, and the total interacting area is consequently much smaller than the apparent one, as illustrated in Fig. 1(b) [9], [10], [11], [12], [13]. In the context of contact between rough surfaces, the surface topology is usually assumed as a stationary Gaussian random field, e.g.…”

Section: Introductionsupporting

confidence: 80%

Stochastic Multiscale Model of MEMS Stiction Accounting for High-Order Statistical Moments of Non-Gaussian Contacting Surfaces

Hoang

Golinval

et al. 2018

J. Microelectromech. Syst.

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Abstract-Stiction is a failure mode of microelectromechanical systems (MEMS) involving permanent adhesion of moving surfaces. Models of stiction typically describe the adhesion as a multiple asperity adhesive contact between random rough surfaces, and they thus require a sufficiently accurate statistical representation of the surface, which may be non-Gaussian. If the stiction is caused primarily by multiple asperity adhesive contact in only a small portion of the apparent area of the contacting surfaces, the number of adhesive contacts between asperities may not be sufficiently statistically significant for a homogenized model to be representative. In [Hoang et al., A computational stochastic multiscale methodology for MEMS structures involving adhesive contact, Tribology International, 110:401-425, 2017], the authors have proposed a probabilistic multiscale model of multiple asperity adhesive contact that can capture the uncertainty in stiction behavior. Whereas the previous paper considered Gaussian random rough surfaces, the aim of the present paper is to extend this probabilistic multiscale model to non-Gaussian random rough surfaces whose probabilistic representation accounts for the high order statistical moments of the surface height. The probabilistic multiscale model thus obtained is validated by means of a comparison with experimental data of stiction tests of cantilever beams reported in the literature.

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Section: Introductionsupporting

confidence: 80%

Stochastic Multiscale Model of MEMS Stiction Accounting for High-Order Statistical Moments of Non-Gaussian Contacting Surfaces

Hoang

Golinval

et al. 2018

J. Microelectromech. Syst.

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“…The capillary pressure force dominates the surface tension force for microspheres that are larger than 1 μm [41]. For the microsphere-plane model, the capillary force is [43], [44] …”

Section: Force Analysismentioning

confidence: 99%

Active Release of Microobjects Using a MEMS Microgripper to Overcome Adhesion Forces

Chen¹,

Zhang²,

Sun

2009

J. Microelectromech. Syst.

123

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Abstract-Due to force scaling laws, large adhesion forces at the microscale make rapid accurate release of microobjects a longstanding challenge in pick-place micromanipulation. This paper presents a new microelectromechanical systems (MEMS) microgripper integrated with a plunging mechanism to impact the microobject for it to gain sufficient momentum to overcome adhesion forces. The performance was experimentally quantified through the manipulation of 7.5-10.9-µm borosilicate glass spheres in an ambient environment under an optical microscope. Experimental results demonstrate that this microgripper, for the first time, achieves a 100% successful release rate (based on 200 trials) and a release accuracy of 0.70 ± 0.46 µm. Experiments with conductive and nonconductive substrates also confirmed that the release process is not substrate dependent. Theoretical analyses were conducted to understand the release principle. Based on this paper, further scaling down the end structure of this microgripper will possibly provide an effective solution to the manipulation of submicrometer-sized objects.[

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“…The nondimensional parameters are defined as follows: a = a/ Q 2 γE * −1 1/(2n−1) [16] δ = δ/ Q γ n E * −n 1/(2n−1) [17] P = P/π Q 3 γ n+1 E * n−2 1/(2n−1) , [18] where P, a, and δ are the total adhesive force, the contact area, and the displacement, respectively. Among the total adhesive force P, the meniscus force component P m due to the Laplace pressure outside the area of contact is…”

Section: Case 2: Contact Configurationmentioning

confidence: 99%

A More General Capillary Adhesion Model Including Shape Index: Single-Asperity and Multi-Asperity Cases

Wang

Régnier

2014

Tribology Transactions

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The capillary interaction between a sphere and a flat substrate has been widely investigated. Considering the complex shape of single asperities in real configurations, a more general model of capillary adhesion force including a power law shape index of asperities is developed. For the interaction between a single asperity with any axisymmetric power law shape profile and a flat substrate, the deformation originating from the adhesive force and the contact force is included in the model. Combining the single asperity capillary adhesion model and a statistical description of rough surfaces, the capillary adhesion between two rough surfaces is also studied. The simulation results show that the adhesive force between a single asperity and a flat surface increases gradually with increasing shape index at the same humidity level. For typical microelectromechanical systems surfaces, the adhesive force between rough surfaces also increases with the increased shape index of multi-asperities. Specifically, when the shape index varies from 1.8 to 2.4 at high humidity, the adhesive force between a single asperity and a plane may change remarkably, and the adhesion energy between rough surfaces may increase by several orders of magnitude at low humidity. These results show the necessity of including a shape index for modeling the capillary adhesion between single asperities, and a more detailed description of rough surfaces is also helpful to better quantify the capillary adhesion between rough surfaces.

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Modeling of Wet Stiction in Microelectromechanical Systems (MEMS)

Cited by 34 publications

References 21 publications

Stochastic Multiscale Model of MEMS Stiction Accounting for High-Order Statistical Moments of Non-Gaussian Contacting Surfaces

Stochastic Multiscale Model of MEMS Stiction Accounting for High-Order Statistical Moments of Non-Gaussian Contacting Surfaces

Active Release of Microobjects Using a MEMS Microgripper to Overcome Adhesion Forces

A More General Capillary Adhesion Model Including Shape Index: Single-Asperity and Multi-Asperity Cases

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