2017
DOI: 10.1016/j.ijheatmasstransfer.2017.06.056
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Modeling pulsed laser ablation of aluminum with finite element analysis considering material moving front

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Cited by 66 publications
(28 citation statements)
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“…Characterization of the QuikLaze 50ST2 multimodal laser for the laser micromachining of six (6) different materials demonstrated that the ablation depths that were experimentally obtained fit relatively well with a simple thermodynamic theory for most of the materials. While more complex theories or analysis [47] could improve the discrepancy, this technique is accurate enough to allow one to readily calculate possible ablation depths of a new material using such a laser micromachining tool. Additionally, two applications of multimodal laser micromachining were demonstrated: shadow mask fabrication and patterning of organic and inorganic materials in the sub-5 µm range and IDE fabrication in the sub-10 µm range.…”
Section: Discussionmentioning
confidence: 99%
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“…Characterization of the QuikLaze 50ST2 multimodal laser for the laser micromachining of six (6) different materials demonstrated that the ablation depths that were experimentally obtained fit relatively well with a simple thermodynamic theory for most of the materials. While more complex theories or analysis [47] could improve the discrepancy, this technique is accurate enough to allow one to readily calculate possible ablation depths of a new material using such a laser micromachining tool. Additionally, two applications of multimodal laser micromachining were demonstrated: shadow mask fabrication and patterning of organic and inorganic materials in the sub-5 µm range and IDE fabrication in the sub-10 µm range.…”
Section: Discussionmentioning
confidence: 99%
“…This equation represented schematically ( Figure 4) balances intrinsic energy and enthalpy, which are state variables and omits fundamental process parameters that are not state variables (i.e., particle dynamics) [45,46]. While the inclusion of these fundamental process parameters could lead to a more accurate theoretical solution, the complexity would be vastly increased due to the use of non-linear partial differential equations and the need for sophisticated simulation software to solve such equations [5,6,10,40,44,47]. Additionally, since this laser micromachining setup does not operate in the femtosecond regime, ablation occurs through melt expulsion and redeposition driven by the vapor pressure and the recoil pressure of light [44,47,48].…”
Section: Theoretical Backgroundmentioning
confidence: 99%
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“…First, it is responsible for laser ablation. Conventional surface evaporation and phase explosion (volumetric evaporation) are the principal mechanisms for nanosecond pulses [19]. It seems that the phase explosion is more important for higher energies and shorter pulses while the surface evaporation becomes the principal ablation mechanism for longer pulses [2].…”
Section: Introductionmentioning
confidence: 99%
“…The surface temperature is the principal parameter influencing the rate of evaporation. This is why one can decouple gas dynamics and heat transfer in the target [19] under certain conditions. Generally, evaporation from the target surface and back condensation from the gas phase are competing processes [20].…”
Section: Introductionmentioning
confidence: 99%