Modeling reactive magnetron sputtering: a survey of different modeling approaches

Abstract

The paper focuses on providing an insight into the current state of computational modeling regarding reactive magnetron sputtering systems. A detailed compilation of developed models is gathered and grouped into categories based on the phenomena being modeled. The survey covers models developed for the analysis of magnetron discharges, particle-surface interactions at the target and the substrate, as well as macroscopic models. Corresponding software packages available online are also presented. After gaining the necessary insight into the current state of research, a list of the most challenging tasks is given, comparing diffierent approaches, that have been used to combat the encountered difficulties. The challenges associated with modeling tasks range from analytical complexity, mathematical know-how used for model approximation and reduction, as well as optimization between computational load and result accuracy. As a conclusion, the future challenges are compiled into a list and a probable direction in modeling is given, that is likely to be further pursued.

Modeling of Reactive Sputtering—History and Development

“…Until now, the Berg initial isothermal chemisorption model has been a popular tool for studying the processes of film deposition of simple compounds with the reactive sputtering method [65][66][67]. Undoubtedly, it was an advance in the modeling of the reactive sputtering process.…”

“…The flux sputtered from the target surface includes JtM (pure metal atoms M), JtC 1 (MmOn molecules), and JtC 2 (MN molecules); 5. Each surface consumes reactive gas to maintain surface reactions (66) and (67). Let Qi j denote the fluxes incident on the i-th surface (i = t, s, w) and participating in the formation of oxide MmOn (j = 1) and nitride MN (j = 2).…”

A fluid model of pulsed direct current planar magnetron discharge

“…Due to operational challenges and material loss, computational modelling is an economic way to test and validate complex sputtering models 15 . Fluid models are among the simplest tools for modelling species in hydrodynamic equilibrium and find applications in non-pulsed DCM discharge 16 , high frequency pulsed DC discharge in nitrogen 17 and capacitively couple plasma at RF frequency 18 .…”