Modeling the influence of the duration of water vapor pulses on the properties of hafnium oxide synthesized by atomic layer deposition method

Bulyarskiy, Sergey V.; Litvinova, Kristina I.; L'vov, Pavel E.; Rudakov, Grigory A.; Gusarov, Georgy G.

doi:10.1016/j.vacuum.2024.113602

Vacuum

2024

DOI: 10.1016/j.vacuum.2024.113602

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Modeling the influence of the duration of water vapor pulses on the properties of hafnium oxide synthesized by atomic layer deposition method

Sergey V. Bulyarskiy,

Kristina I. Litvinova,

Pavel E. L'vov

et al.

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2025

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Modeling the influence of the duration of water vapor pulses on the properties of hafnium oxide synthesized by atomic layer deposition method

Cited by 1 publication

References 52 publications

Study on the structure evolution of (FeCoNiCu)Nx high-entropy thin film

Study on the structure evolution of (FeCoNiCu)Nx high-entropy thin film

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