Modeling the material structure and couple stress effects of nanocrystalline silicon beams for pull-in and bio-mass sensing applications

Shaat, Mohamed; Abdelkefi, A.

doi:10.1016/j.ijmecsci.2015.08.002

Cited by 53 publications

(17 citation statements)

References 55 publications

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“…Recently, stability and frequency analyses of miniature biosensors were the main objectives of numerous studies 1,2,16,43 . In micro and nanoscales, where the ratio of the external surface of the movable electrode to its volume is relatively considerable, the surface energy effect dominates.…”

Section: Parametric Studymentioning

confidence: 99%

“…Biosensors have been introduced to detect different characteristics of biological particles. They have numerous applications in biotechnology as biomass detectors 1,2 , thermal switches [3][4][5][6] , smart resonators [7][8][9][10][11][12] , and other biomedical devices [13][14][15][16][17][18][19][20][21][22][23][24] . Due to the important biological applications of such systems in the drug delivery, clinical diagnostics, measurement, and organism detection, many scientists have studied their features such as operational range, instability, and performance 8,24,25 .…”

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confidence: 99%

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Simulation of an electrically actuated cantilever as a novel biosensor

SoltanRezaee

Bodaghi

2020

Sci Rep

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Recently, detecting biological particles by analyzing their mechanical properties has attracted increasing attention. To detect and identify different bioparticles and estimate their dimensions, a mechanical nanosensor is introduced in this paper. to attract particles, numerous parts of the substrate are coated with different chemicals as probe detectors or receptors. The principal of cell recognition in this sensor is based on applying an electrical excitation and measuring the maximum deflection of the actuated cantilever electrode. investigating the critical voltage that causes pull-in instability is also important in such highly-sensitive detectors. the governing equation of motion is derived from Hamilton's principle. A Galerkin approximation is applied to discretize the nonlinear equation, which is solved numerically. Accuracy of the proposed model is validated by comparison studies with available experimental and theoretical data. The coupled effects of geometrical and mechanical properties are included in this model and studied in detail. Moreover, system identification is carried out to distinguish bioparticles by a stability analysis. Due to the absence of a similar concept and device, this research is expected to advance the state-of-the-art biosystems in identifying particles.

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Section: Parametric Studymentioning

confidence: 99%

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confidence: 99%

Simulation of an electrically actuated cantilever as a novel biosensor

SoltanRezaee

Bodaghi

2020

Sci Rep

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“…For example, nano-resonators are being used for measuring masses of nano-objects (e.g. atoms) by measuring the corresponding frequency changes [1][2][3][4][5][6][7][8][9][10][11]. Many factors may affect the accuracy of these resonators in detecting physical quantities [9][10][11].…”

Section: Introductionmentioning

confidence: 99%

“…Moreover, it was demonstrated that the microstructure, size, and surface texture (i.e. surface roughness, waviness, and altered layer) of these resonators influence their performance in different applications [4,9,10,15]. The operating principle of nanodevices depends on models to transfer a resonator's property change into a value of the measured physical quantity.…”

Section: Introductionmentioning

confidence: 99%

Effects of processing force on performance of nano-resonators produced by magnetron sputtering deposition

Shaat

2018

Physica E: Low-dimensional Systems and Nanostructures

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Magnetron sputtering is a perfect technique for processing nanomaterials for engineering and medical applications. A material can be processed with specific mechanical properties, microstructure, and surface texture by controlling the parameters of magnetron sputtering. Therefore, studies should be conducted on investigating the processing conditions on the performance of nanomaterials processed by magnetron sputtering.In this study, effects of the processing force on performance of micro/nano-resonators produced by magnetron sputtering are revealed. The processing force is defined as the ratio of the sputtering power-tothe substrates traveling velocity. By comparing the substrate's traveling velocity to the deposition rate of the sputtered particles, relations are derived for the thickness and surface texture evolutions with the processing force. The coefficients of these relations are experimentally determined for mechanical resonators made of FeNiCr alloy. Then, the variations of the natural frequencies of these resonators with the processing force of magnetron sputtering and the deposition rate of the sputtered particles are depicted.It is demonstrated that special considerations should be given for the effects of the processing conditions when design mechanical resonators produced by magnetron sputtering.

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“…Structural elements such as beams, plates and bars have found widespread applications at the micro-and nanolevel in micro-and nanoelectromechanical systems (MEMS/NEMS) such as microactuators [5,25], piezoelectric sensors [18], mass sensors [31] and atomic force microscopes [13]. Beams are one of the most common structural elements which necessitates the study of their dynamic behavior at the microscale.…”

Section: Introductionmentioning

confidence: 99%

Free and forced vibration nonlinear analysis of a microbeam using finite strain and velocity gradients theory

Fernandes¹,

Mousavi²,

El-Borgi³

2016

Acta Mech

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A nonlinear finite strain and velocity gradient framework is formulated for the Euler-Bernoulli beam theory. This formulation includes finite strain and the strain gradient within the strain energy generalization as well as velocity and its gradient within the kinetic energy generalization. Consequently, static and kinetic internal length scales are developed to capture size effects. The governing equation with initial and boundary conditions is obtained using the variational approach. Free and forced vibration of a simply supported nanobeam is studied for different values of static and kinetic length scales using the method of multiple scales.

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Modeling the material structure and couple stress effects of nanocrystalline silicon beams for pull-in and bio-mass sensing applications

Cited by 53 publications

References 55 publications

Simulation of an electrically actuated cantilever as a novel biosensor

Simulation of an electrically actuated cantilever as a novel biosensor

Effects of processing force on performance of nano-resonators produced by magnetron sputtering deposition

Free and forced vibration nonlinear analysis of a microbeam using finite strain and velocity gradients theory

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