In this chapter, the sensor designed, modeling, simulation analysis and fabrication process will be discussed. New type of planar interdigital having unique configuration with different number of electrodes configuration will be introduced. The readers will get a good idea about design and modeling stages required to make a novel sensors. The different fabrication process involves different substrates and fabrication method will be highlighted. The main purpose of this chapter is to provide some fundamentals in the development of planar interdigital sensors.
Operating PrincipleThe operating principle of planar interdigital sensor basically follows the rule of two parallel plate capacitors, where electrodes open up to provide a one sided access to the material under test (MUT) [1]. The electric field lines of parallel plate capacitor and an interdigital sensor are shown in Fig. 2.1. The electric field lines generated by the sensor penetrate into the MUT and will change the impedance of the sensor. The sensor behaves as a capacitor in which the capacitive reactance becomes a function of system properties. Therefore by measuring the capacitive reactance of the sensor the system properties can be evaluated.Since the electrodes of an interdigital sensor are coplanar, therefore the measured capacitance will give a high signal-to-noise ratio. In order to get a strong signal, the electrode pattern of the interdigital sensor can be repeated many times. The term ''interdigital'' refer to a digit-like or finger-like periodic pattern of parallel in-plane electrodes, used to build up the capacitance associated with the electric fields that penetrate into a material sample [1]. The conventional interdigital sensor is shown in Fig. 2.2. AC voltage source will be applied as an excitation voltage between the positive terminal and the negative terminal. An electric field is formed from positive terminal to negative terminal. Mamishev, M. S. Abdul Rahman et al