2017
DOI: 10.17683/ijomam/issue2.1
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Modelling and Simulation for Control of a Mems Electromagnetic Scanner

Abstract: Abstract:The article presents the mathematical modelling and simulation models of a MEMS electromagnetic scanning system, with the aim to discuss sources of nonlinear behavior and to compare voltage vs. current control modes. The electromagnetic (EM) actuators develop high forces at any scale, and can be used at both resonance or far from it. This study completes previous design and manufacturing work of the electro-mechanical structure and its electric supply circuits. A nonlinear mathematical model for a gen… Show more

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