Modelling of air damping effect on the performance of encapsulated MEMS resonators

Wang, Ankang; Sahandabadi, Sahereh; Harrison, Tyler R.; Spicer, D. F.; Ahamed, Mohammed Jalal

doi:10.1007/s00542-022-05385-7

Cited by 12 publications

(7 citation statements)

References 33 publications

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“…Yin et al [46] analyzed the influence of air pressure on air damping, which means that the air pressure can be inferred by the damping coefficient of the air. Wang et al [47] further analyzes the relationship between quality factor and air pressure. In this work, various vacuum regions relevant to encapsulated MEMS resonators are investigated using analytical and finite element approaches.…”

Section: Sensitivity Analysis 41 Acceleration Measurement Based On Sn...mentioning

confidence: 99%

Acceleration sensing based on the bifurcation dynamics of parametrically excited mode-localized resonators

Zhao,

Tang,

Kacem

et al. 2023

Phys. Scr.

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A parametrically excited mode-localized accelerometer is designed using the bifurcation phenomenon to improve the robustness of the fluctuation of the driving voltage and damping while maintaining high sensitivity. A dynamic multi-physics model was established while considering both mechanical and electrostatic nonlinearities. The equation was solved by method of multiple scales and verified by harmonic balanced method coupled with the asymptotic numerical method. Two types of bifurcation exist in amplitude frequency response, namely Saddle-Node bifurcation and Supercritical Hopf bifurcation. By introducing Saddle-Node bifurcation, the response amplitude and measurement range can be improved by 100% and 1000%, respectively, while the sensitivity of the amplitude ratio is about 2 orders of magnitude higher than that based on the frequency ratio. At the Supercritical Hopf bifurcation point, a small acceleration will change the topological structure from Supercritical Hopf to Saddle-Node bifurcation. The variation in the amplitude ratio of the Supercritical Hopf point with acceleration is similar to the sign function, which leads to an extremely high sensitivity of 10000%/g in a dynamic range of ±0.001 g. Moreover, the Supercritical Hopf bifurcation point is not affected by the amplitude of the excitation voltage and damping coefficient, which provides a new method for improving the sensing robustness. Ethical Compliance: All procedures performed in studies involving human participants were in accordance with the ethical standards of the institutional and/or national research committee and with the 1964 Helsinki Declaration and its later amendments or comparable ethical standards. Conflict of Interest declaration: The authors declare that they have NO affiliations with or involvement in any organization or entity with any financial interest in the subject matter or materials discussed in this manuscript.

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Section: Sensitivity Analysis 41 Acceleration Measurement Based On Sn...mentioning

confidence: 99%

Acceleration sensing based on the bifurcation dynamics of parametrically excited mode-localized resonators

Zhao,

Tang,

Kacem

et al. 2023

Phys. Scr.

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“…These cavity structures can also introduce the air-damping effect. (2) In recent studies, cavity depth has been regarded as a notable parameter to improve MEMS device performance by optimizing cavity damping.…”

Section: Introductionmentioning

confidence: 99%

Cavity-Depth Effect on 3D Wafer-Level-Packaged MEMS Resonators by Slide-Film Damping

Liang,

Lv,

Han

et al. 2024

Sensors and Materials

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The slide-film damping effect caused by cavity structures is easily neglected in the design of bulk-micro-machined resonant MEMS device fabrication and packaging processes. On the basis of theory calculations, simulations, and actual tests, in this study, we investigate the cavity-depth effect on 3D wafer-level packaged MEMS resonators with the in-plane-motion mode, in which slide-film damping is dominant. On the one hand, it is found that the slide-film damping coefficient is inversely proportional to the cavity depth and remains stable for the cavity depth above a specific value. The critical cavity depth acquired from theoretical results is ~10 μm, which is distinct from that of ~30 μm from simulation results. On the other hand, the variation tendency of simulation results is more in agreement with those of test results for fabricated devices than the theoretical prediction. Hence, before the structure fabrication for a resonator dominated by slide-film damping, it is imperative to choose a conservative cavity depth with a relatively high value from the combination of theory and simulation analyses, so as to ensure the high or desired Q-factors of fabricated resonators, particularly in wafer-level packaging with the low-vacuum or atmospheric pressure. Overall, this work provides not only an analysis strategy on device cavities' slide-film damping but also the optimization design of wafer-level packaging structures and processes.

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“…Physical quantities can be determined by measuring the changes in the amplitude ratio of resonators caused by the related external perturbations, such as mass, pressure, and force [5]. Mode-localized sensors are more sensitive than conventional sensors with frequency outputs [6], [7], [8]. A high quality factor leads to resonance with a sharp peak and high gain, resulting in a more sensitive and efficient sensor, and a low quality factor results in a damped vibration amplitude, making the micro-resonator motion unstable and not suitable for high performance applications [9].…”

Section: Introductionmentioning

confidence: 99%

Research on Anchor Loss in Weakly Coupled Resonator Systems of Mode-Localized Mass Sensor Based on PML Method

Cheng,

Zhang,

Yuan

et al. 2024

Preprint

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The performance of a micro-resonator highly depends on the rate of vibrational energy dissipation. Anchor loss is one of the major sources of energy dissipation in vacuum-encapsulated weakly coupled mode-localized sensors. To study anchor energy loss in weakly coupled-resonator systems, the Perfectly Matched Layer (PML) method is utilized to investigate the influence of key factors on the anchor loss quality factor of mass sensor, including the size and position of the coupled beam, the resonator dimensions, and the material properties of weakly coupled resonator. The results indicate that increasing the ratio of Young’s modulus between the substrate and resonator beam, enhancing the length-to-width ratio of the resonator beam, selecting appropriate coupling positions, and reducing the width of the coupled beam can effectively reduce anchor loss, thus improving the quality factor of mode-localized weakly coupled systems. Moreover, the anchor loss is not only related to the stress distribution at the anchor region but also closely related to the eigenfrequency of the coupled resonant system. These findings can provide valuable references for the design and optimization of mode-localized mass sensors.

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Modelling of air damping effect on the performance of encapsulated MEMS resonators

Cited by 12 publications

References 33 publications

Acceleration sensing based on the bifurcation dynamics of parametrically excited mode-localized resonators

Acceleration sensing based on the bifurcation dynamics of parametrically excited mode-localized resonators

Cavity-Depth Effect on 3D Wafer-Level-Packaged MEMS Resonators by Slide-Film Damping

Research on Anchor Loss in Weakly Coupled Resonator Systems of Mode-Localized Mass Sensor Based on PML Method

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