Modelling of an accelerometer based on a levitated proof mass

Houlihan, Ruth; Kraft, Michaël

doi:10.1088/0960-1317/12/4/325

Cited by 32 publications

(29 citation statements)

References 6 publications

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“…Thus, the single variable capacitance model needs to be converted into a multivariable capacitance model. Figure 5 shows the inner and outer radii of the rotor and component of angle for calculating the overlap area [3]. Then, the capacitance of the rotor is determined by 12 Figure 5.…”

Section: Wobbling Effects On Vertical Rebalance Controlmentioning

confidence: 99%

“…Inner and outer radii of rotor and angular component. Figure 5 shows the inner and outer radii of the rotor and component of angl the overlap area [3]. Then, the capacitance of the rotor is determined by     (23)…”

Section: Wobbling Effects On Vertical Rebalance Controlmentioning

confidence: 99%

“…To address this, many research studies have been conducted. Among these, the levitated multi-axis gyro-accelerometer ("levitated gyro") appears to go beyond the limitations of conventional MEMS gyroscopes, with inherent performance advantages [1][2][3].…”

Section: Introductionmentioning

confidence: 99%

“…In case of the levitated gyro, it is an inevitable error factors during the manufacturing process. It is one of the risk factors threatening the stability and degrading sensor performance because a unit of the generated drift rate is equal to the output of angular velocity [3]. Thus, the wobbling effect needs to be further investigated to develop appropriate dynamic compensation.…”

Section: Introductionmentioning

confidence: 99%

“…15 (3), 293-301 (2014) considering the wobbling effect and proposes an effective tilt stabilization method by newly introducing moment-control electrodes.…”

Section: Introductionmentioning

confidence: 99%

See 4 more Smart Citations

Study on Vertical Dynamics Compensation for Wobbling Effect Mitigation of Electrostatically Levitated Gyroscope

Lee¹,

Song²,

Sung³

et al. 2014

International Journal of Aeronautical and Space Sciences

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We present a study of vertical dynamics control of an electrostatically levitated gyro-accelerometer considering the wobbling effect and propose a tilt stabilization method with newly introduced control electrodes. Typically, a rotor in a vacuum rotates at high velocity, which may create a drift rate and lead to displacement instability due to the tilt angle of the rotor. To analyze this, first we set up a vertical dynamic equation and determined simulation results regarding displacement control. After deriving an equation for drift dynamics, we analyzed the drift rate of the rotor and the wobbling effect for displacement control quantitatively. Then, we designed new sub-electrodes for moment control that will decrease the drift amplitude of wobbling dynamics. Finally, a simulation study demonstrated that the vertical displacement control with the wobbling compensation electrodes mitigated the rotor's drift rate, showing the effectiveness of the newly proposed control electrodes.

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Section: Wobbling Effects On Vertical Rebalance Controlmentioning

confidence: 99%

Section: Wobbling Effects On Vertical Rebalance Controlmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

“…15 (3), 293-301 (2014) considering the wobbling effect and proposes an effective tilt stabilization method by newly introducing moment-control electrodes.…”

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

Study on Vertical Dynamics Compensation for Wobbling Effect Mitigation of Electrostatically Levitated Gyroscope

Lee¹,

Song²,

Sung³

et al. 2014

International Journal of Aeronautical and Space Sciences

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Dynamical Modeling and Identification of a High-Performance MEMS Accelerometer with Effective Stiffness Electrostatically Tuned Around Zero

Ye,

Ma,

Jin

et al. 2024

Lecture Notes in Mechanical Engineering

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Design and fabrication of an electrostatically suspended microgyroscope using UV-LIGA technology

et al. 2009

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A micromachined electrostatically suspended gyroscope, with a wheel-like rotor housed by top stator and bottom stator, using UV-LIGA microfabrication technology, was presented. The designed structure and basic operating principle of the gyroscope are described. The key steps in the fabrication process, such as wet etching of Pyrex glass pits for soldering, and integration of thick nickel structures by removal of SU-8 mold, were considered in detail and well solved. Cr/Pt/photoresist was used as etching mask and the etched pits, in depth of near 30 lm, with aspect ratio (depth to undercutting) of 0.75, were obtained. With metal foundations constructed for consolidation, successful integration of the nickel structures, in thickness of 200 lm, was achieved by successful removal of the SU-8 mold using oleum. After the two stators and the rotor were fabricated separately, they were assembled and soldering bonded to form axial and radial small gaps, hence, the initial prototype of the microgyroscope was realized. The key techniques described in this paper can be applied to fabrication of other micro devices. The metal foundation method, associated with removal of SU-8 mold by oleum, is expected to make SU-8 wider applications in making integrated microstructures with fabricated circuitry on the same chip.

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Modelling of an accelerometer based on a levitated proof mass

Cited by 32 publications

References 6 publications

Study on Vertical Dynamics Compensation for Wobbling Effect Mitigation of Electrostatically Levitated Gyroscope

Study on Vertical Dynamics Compensation for Wobbling Effect Mitigation of Electrostatically Levitated Gyroscope

Dynamical Modeling and Identification of a High-Performance MEMS Accelerometer with Effective Stiffness Electrostatically Tuned Around Zero

Design and fabrication of an electrostatically suspended microgyroscope using UV-LIGA technology

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