Modelling of ceramic coatings grow during Arc-PVD deposition

Abstract

This paper presents the results of modeling the growth of ceramic coatings obtained by the kinetic Monte Carlo method. In the considered model, the possibility of forming misoriented grains in the direction of coating growth and in the plane of coating is realized. To verify the model, three coatings of different compositions were prepared, and their structure and composition was studied by TEM and EDS.