2003
DOI: 10.1016/s0042-207x(03)00075-7
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Modelling of plasma etching using a generalized regression neural network

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Cited by 55 publications
(28 citation statements)
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“…Leung et al (Leung et al, 2000) developed a model using GRNN for the purpose of forecasting exchange rate and compares its performance with a variety of forecasting techniques and reported that, apart from having a higher degree of prediction accuracy, GRNN performs statistically better than other evaluated models compared in the study for different currencies. GRNN has also been reported to have performed well in prediction to forecast plant disease (Chtioui et al, 1999), and modelling of plasma etching (Kim et al, 2003).…”
Section: Related Workmentioning
confidence: 98%
“…Leung et al (Leung et al, 2000) developed a model using GRNN for the purpose of forecasting exchange rate and compares its performance with a variety of forecasting techniques and reported that, apart from having a higher degree of prediction accuracy, GRNN performs statistically better than other evaluated models compared in the study for different currencies. GRNN has also been reported to have performed well in prediction to forecast plant disease (Chtioui et al, 1999), and modelling of plasma etching (Kim et al, 2003).…”
Section: Related Workmentioning
confidence: 98%
“…x j and x ij are the jth element of x and x i , respectively, f is the so-called spread factor, the optimal value of which is often determined empirically (Kim et al 2003). The function approximation is smoother in the large spread than in the small spread.…”
Section: General Regression Neural Network (Grnn)mentioning
confidence: 99%
“…The 味 is generally regarded as the spread factor, whose optimal value is often determined experimentally. (Kim et al, 2003). If the spread becomes larger, the function approximation will be smoother.…”
Section: Generalized Regression Neural Networkmentioning
confidence: 99%