Modelling of the Dynamic Process in the Microbeam of the MEMS Resonators

Rebot, Dariya; Shcherbovskykh, Serhiy; Stefanovych, Tetyana; Topilnytskyy, Volodymyr

doi:10.1109/memstech63437.2024.10620037

2024 IEEE 19th International Conference on the Perspective Technologies and Methods in MEMS Design (MEMSTECH) 2024

DOI: 10.1109/memstech63437.2024.10620037

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Modelling of the Dynamic Process in the Microbeam of the MEMS Resonators

Dariya Rebot,

Serhiy Shcherbovskykh,

Tetyana Stefanovych

et al.

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Modelling of the Dynamic Process in the Microbeam of the MEMS Resonators

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References 23 publications

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