Modern Solutions for Functional Coatings in CVD Processes

Игуменов, И. К.; Lukashov, Vladimir V.

doi:10.3390/coatings12091265

Cited by 6 publications

(8 citation statements)

References 38 publications

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“…We have performed additional vapor pressure measurements for crystalline Sc(acac) 3 and Sc(hfac) 3 using the transpiration method in order to resolve a conflict of literature data (see Figure 1 and Section 3.3). The vapor pressures of Sc(Meacac) 3 have been measured for the first time.…”

Section: Vapor Pressurementioning

confidence: 99%

“…Some of the TGA data from refs [9,11,12,48] appear to be consistent with other entries in Table 2 and have been included in the averaging. To get sublimation and vaporization enthalpies from kinetic study of Sc(acac) 3 and Sc(tfac) 3 [12], we have added RT contribution [51] to the activation energy, E a , reported in the reference (T is the temperature at which the kinetic parameter has been referenced). The DSC method used to determine the enthalpies of vaporization of Sc(acac) 3 and Sc(thd) 3 ) [40,45] also suffers from methodological ambiguities.…”

Section: Vapor Pressurementioning

confidence: 99%

“…Another opportunity of the relation ( 15) is an ability to fill in the absent information by deriving the enthalpy of phase transition indirectly. Thus, the missing vaporization enthalpies for Sc(Meacac) 3 and Sc(hfac) 3 (Table 2) have been calculated according to Equation (15) and used for structure-properties correlations as shown below. a Uncertainties in this table are expressed as expanded uncertainties at a level of confidence of 0.95 (k = 2).…”

Section: Fusion Enthalpies Of Scandium(iii) β-Diketonatesmentioning

confidence: 99%

“…The process has many varieties, differing in the types of chemical reactions and the conditions for their procedures. However, the application principle is general and is based on the delivery of vapors of a compound containing the necessary elements (precursor) to the object to be coated (substrate), where it is converted into the target material by decomposition, oxidation, or other chemical reactions [3]. The variant in which metal compounds with organic ligands act as precursors is called MOCVD (metal-organic chemical vapor deposition).…”

Section: Introductionmentioning

confidence: 99%

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Metal-Organic Chemical Vapor Deposition Precursors: Diagnostic Check for Volatilization Thermodynamics of Scandium(III) β-Diketonates

2023

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Scandium complexes with β-diketonate ligands are valuable precursors for the metal–organic chemical vapor deposition (MOCVD) of scandia based materials, but data on their volatilization thermodynamics crucial to MOCVD technology are in a huge disarray. We have addressed this issue with a diagnostic tool based on the principles of group additivity and structure–property relationships, which had been developed by us specifically for metal–organic objects. For this purpose, a mass of experimental data on the vapor pressures and enthalpies of sublimation, vaporization and fusion available in the literature for scandium(III) β-diketonates has been compiled and analyzed. Additionally, saturated vapor pressures and thermodynamic sublimation characteristics have been obtained for scandium(III) complexes with acetylacetone, hexafluoroacetylacetone, and 3-methyl-2,4-pentanedione by transpiration and thermogravimetric methods. New data have allowed us to arbitrate the conflict of literature data. As a result, a consistent set of enthalpies of the three discussed processes has been obtained for eight scandium complexes. Dispersion interactions and non-additive effects have been shown to be typical for metal tris-β-diketonates. They have been taken into account to improve the diagnostic check. It is now possible to quite easily assess the thermodynamics of tris-β-diketonate complexes with different metals which are in demand as precursors in gas-phase technology.

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Section: Vapor Pressurementioning

confidence: 99%

Section: Vapor Pressurementioning

confidence: 99%

Section: Fusion Enthalpies Of Scandium(iii) β-Diketonatesmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Metal-Organic Chemical Vapor Deposition Precursors: Diagnostic Check for Volatilization Thermodynamics of Scandium(III) β-Diketonates

2023

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“…The deposition of a family of functional coatings using volatile compounds are offered by the chemical vapor deposition processes but these still require better understanding of and modelling of the multi-scale phenomena induced (Igumenov and Lukashov, 2022). These include quantum effects, molecular dynamics, kinetic Monte Carlo methods, as well as computational fluid dynamics in the framework of macroscopic continuum models (Cheimarios et al, 2021); (Cave et al, 2008).…”

Section: Coatings-soft and Hard Or Thick And Thin Face Challengesmentioning

confidence: 99%

Grand challenges in coatings, dyes and interface engineering

Wood¹

2023

Front. Coat. Dye In.

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The subject areas of Coatings, Dyes and Interface Engineering are rarely seen together although there is potentially a huge synergy from embracing coatings-dyes-interface interactions. This allows an enabling science that aligns with global grand challenges such as net zero (batteries, renewal energy systems, low drag, antifouling and low friction interfaces, self-healing coatings, functionally graded, composite and multi-layered coatings sustainability of coatings, etc.), biomedical/health technologies, space and security. Coatings, dyes and interfaces engineering are used to optimize the functionality and to improve the entire function of materials and surfaces. Coatings have a wide range of forms, such as paints, adhesives, semiconductor thin films, hard facings and have a varied application route such as mechanical systems, solar cells, domestic appliances, photonics, smart coatings, microelectronics, offshore renewables, biomedical and photographic films. Several application and synthesis methods, such as sol-gel, spin, dip, physical and chemical vapour deposition, thermal spray, weld overlays, plasma electrolytic oxidation, atomic layer deposition, electroplating and so on, have been used for thin or thick hard and soft coatings and films.This article looks at recent state-of-the-art and related special issues and review papers to identify trends and future challenges for research in these areas. In scope for embracing coatings-dyesinterface interactions are thin and thick, composite, hard and soft coatings, coating structure and properties, processes for coating deposition, modification and characterization techniques, functional, smart, self-healing and sensing coatings, dyes, pigments and their intermediates. These in turn rely on fundamental mechanical and chemical as well as functional properties of surfaces and interfaces, theoretical and computational modelling of surfaces and interfaces as well as colloids, nanoparticles and large interfaces. The key to improved performance of coatings-dyesinterface engineering is understanding the manufacturer-composition-properties-performance interactions aligned to the service environment and operating conditions. Such research will be essential for energy research, photovoltaics, battery and electrochemical surfaces, biomedical applications, electronic applications of dyes and pigments, low friction, efficient machines and low drag, hydrophobic and nature inspired coatings. However, new understanding is needed for dynamic interfaces covering wear, corrosion, erosion for example. Modern measurement and imaging systems now allow in-situ and non-destructive monitoring of these interfaces. Miniaturisation of sensors and embedding sensors alongside or within interfaces is now possible which should provide a digital data stream for machine learning algorithms to allow smart interface management. Therefore, the challenges now lie around the synthesis and characterization of thin films and multifunctional coatings and the use of novel interface characterization techniq...

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Chemical Structure, Optical and Dielectric Properties of PECVD SiCN Films Obtained from Novel Precursor

et al. 2022

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A phenyl derivative of hexamethyldisilazane—bis(trimethylsilyl)phenylamine—was first examined as a single-source precursor for SiCN film preparation by plasma enhanced chemical vapor deposition. The use of mild plasma (20 W) conditions allowed the preparation of highly hydrogenated polymeric-like films. The synthesis was carried out under an inert He atmosphere or under that of NH3 with the deposition temperature range from 100 to 400 °C. The chemical bonding structure and elemental composition were characterized by Fourier-transform infrared spectroscopy, energy-dispersive X-ray analysis and X-ray photoelectron spectroscopy. The surface morphology was investigated by scanning electron microscopy. Ellipsometric porosimetry, a unique high-precision technique to investigate the porosity of thin films, was applied to examine the porosity of SiCN samples. The films were found to possess a morphologically homogenous dense defect-free structure with a porosity of 2–3 vol.%. SiCN films were studied in terms of their optical and dielectric properties. Depending on the deposition conditions the refractive index ranged from 1.53 to 1.78. The optical bandgap obtained using UV-Vis spectroscopy data varied from 2.7 eV for highly hydrogenated polymeric-like film to 4.7 eV for cross-linked nitrogen-rich film. The dielectric constant was found to decrease from 3.51 to 2.99 with the rise of hydrocarbon groups’ content. The results obtained in this study were compared to the literature data to understand the influence of precursor design to the optical and electrical properties of the films.

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Modern Solutions for Functional Coatings in CVD Processes

Abstract: Today, many technologies for the deposition of various functional coatings using volatile compounds are united under the general name chemical vapor deposition processes from the gas phase (CDV, MOCVD, ALD, CVI, PECVD, etc [...]

Cited by 6 publications

References 38 publications

Metal-Organic Chemical Vapor Deposition Precursors: Diagnostic Check for Volatilization Thermodynamics of Scandium(III) β-Diketonates

Metal-Organic Chemical Vapor Deposition Precursors: Diagnostic Check for Volatilization Thermodynamics of Scandium(III) β-Diketonates

Grand challenges in coatings, dyes and interface engineering

Chemical Structure, Optical and Dielectric Properties of PECVD SiCN Films Obtained from Novel Precursor

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