We describe here the modification of various polymers (polytetrafluoroethylene, polyethyleneterephthalate, and polyvinyl alcohol) by UV-irradiation with wavelengths below 200 nm in an inert or reactive atmosphere. The light sources employed are F 2 -or excimer lasers and excimer lamps. The reactive gases include ammonia (NH 3 ), acetylene (C 2 H 2 ), and oxygen (O 2 ). Photo-dissociated fragments of these gases can react with the polymers or be deposited thereon, resulting in new chemical groups at the surface. Special emphasis is put to improved adhesion of biological cells at these modified surfaces. Potentials applications include cell coated medical implants and prostheses as well as cell micro-arrays for high throughput screening.