Silica nanoparticles with well-defined, highly grafted dense poly(methyl methacrylate) (MMA) were prepared by surface-initiated activators regenerated by electron transfer for atom transfer radical polymerization (ARGET ATRP) of methyl methacrylate with an initiatorfixed silica particle in the presence of air. Two different polymerizations of MMA were carried out under the same conditions using tris[2-(dimethylamino)ethyl]-amine (Me 6 TREN) and N,N,N 0 ,N 0 ,N 00 -pentamethyldiethylene-triamine (PMDETA) as the ligand, respectively. In the CuCl 2 /PMDETA system, polymerization appeared to be more controlled with a lower polydisperisty compared with the CuCl 2 /Me 6 TREN system. The monolayer of these particles was formed at the air-water interface using Langmuir-Blodgett (LB) technique. Multilayers of the particles were fabricated by repetition of LB depositing. A surface pressure-area (p-A) measurement and SEM observation were used to characterize the particle arrays.