Modification of structure and wear resistance of closed-field unbalanced-magnetron sputtered MoS2 film by vacuum-heat-treatment

Zhang, Rui; Cui, Qifeng; Weng, Lijun; Sun, Jiayi; Hu, Ming; Fu, Yanlong; Wang, Desheng; Jiang, Dong; Gao, Xiaoming

doi:10.1016/j.surfcoat.2020.126215

Cited by 25 publications

(16 citation statements)

References 53 publications

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“…The presence of O also causes the film to contain a certain amount of MoO 2 and MoO 3 [ 34 ]. In the process of thermal annealing, thermal annealing will make MoO 3 unstable and then transform into MoO 2 [ 28 ]. The comparison of the element contents in the three films shows that thermal annealing increases the S/Mo ratio of the films, and the content of O decreases with increasing annealing temperature.…”

Section: Resultsmentioning

confidence: 99%

“…The amorphous MoS 2 film was deposited by a closed-field unbalanced-magnetron sputtering (CFUBMS) system (HTC-1200, Hauzer Corp, Venlo, Netherlands) using a rectangular pure MoS 2 target on Si wafers (for characterizing wear behavior and other analysis) [ 28 ]. The deposition was implemented at argon pressure of 1.5 Pa, 4 kW sputtering power and −50 V bias voltage.…”

Section: Methodsmentioning

confidence: 99%

“…In addition, thermal annealing is an effective method to reduce intrinsic defects and change the microstructure of films [ 24 , 25 , 26 , 27 ]. In a previous study, amorphous MoS 2 films were prepared by controlling the deposition temperature and process parameters, and their internal structure was changed through vacuum thermal annealing [ 28 ]. In this work, the damage effects of amorphous and thermally annealed MoS 2 films irradiated by Au 2+ ions were compared.…”

Section: Introductionmentioning

confidence: 99%

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The Improvement of the Irradiation Resistance of Amorphous MoS2 Films by Thermal Annealing

Zhang

Gao

et al. 2022

Nanomaterials

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Among the structural materials used in fusion reactors, amorphous materials can effectively inhibit the accumulation and growth of radiation-induced defects, thereby improving irradiation resistance. However, the application of solid lubricating materials should also consider the changes in their lubricating properties after irradiation. This study shows that the ability to inhibit the deterioration of lubricating properties is not reflected in the amorphous MoS2 film. When the ion fluence reached 4.34 × 1014 ion/cm2, its wear life was reduced by two orders of magnitude, reaching 8.2 × 103 revolutions. After the amorphous MoS2 film is vacuum annealed, its structural stability and resistance to deterioration of lubricating properties are improved. When the ion fluence reaches 1.09 × 1015 ion/cm2, for instance, the wear life of the MoS2 film annealed at 300 °C remains at 8.4 × 104 revolutions. The higher irradiation tolerance of MoS2 films comes from the reduction in intrinsic defects by thermal annealing, which increases the internal grain size and volume fraction of grain boundaries, further providing an effective sink for irradiation defects.

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Section: Resultsmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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The Improvement of the Irradiation Resistance of Amorphous MoS2 Films by Thermal Annealing

Zhang

Gao

et al. 2022

Nanomaterials

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“…Heat treatment improves the crystallinity of MoS 2 , which is one of the main factors influencing friction and wear properties. [ 14 ] Generally, the increased friction of MoS 2 at higher temperatures is attributed to oxidation. [ 12,15 ] A previous study reported on the oxidation of an MoS 2 coating below 400 °C in air and 540 °C in vacuum.…”

Section: Introductionmentioning

confidence: 99%

Friction Characteristics of Molybdenum Disulfide Thin Films Synthesized via Plasma Sulfurization

et al. 2021

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Herein, the tribological behavior of layered few nanometer‐thick MoS2 thin films is evaluated to identify their applicability to an oil‐free solid‐lubrication coating layer. The MoS2 thin films are synthesized using a plasma sulfurization process with optimized steps and conditions derived from a previous study. MoS2 thin films with different thicknesses are heat treated at 400 °C to investigate the effect on their tribological properties. The ball‐on‐disk method is used to observe the friction and wear behavior of the MoS2 thin films, and this test is carried out under an applied load of 0.5 N in an ambient atmosphere (≈23 °C). The coefficient of friction of the unheated MoS2 layers increases rapidly at 32–36 cycles regardless of the thickness. However, the heat‐treated MoS2 films maintain a lower coefficient of friction for more cycles (60–86 cycles). The heat treatment effect effectively increases the wear life of the MoS2 thin film. Based on this result, it is believed that the heat‐treated MoS2 thin films can be potential solid lubricant candidate for micro‐ and nanoelectromechanical systems.

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“…Another attempt is the synthesis of a Mo 2 N/MoS 2 composite, merging the unique properties of both materials [29]. Instead of changing the chemical composition, a downstreamed vacuum heat treatment can improve the wear life time of the coating, due to a change from an amorphous-like to a nanocrystal state of the microstructure [30]. A sophisticated growth method is by high-power impulse magnetron sputtering (HiPIMS), which provides a high ionization of the particle plasma by short impulses on the cathode.…”

Section: Introductionmentioning

confidence: 99%

Controlling the Structural, Mechanical and Frictional Properties of MoSx Coatings by High-Power Impulse Magnetron Sputtering

et al. 2020

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Tribology, as the science and technology of interacting surfaces, typically relies on liquid lubricants which reduce friction and wear. For environmentally friendly tribological purposes and applications requiring a liquid-free performance, solid lubricants, such as MoS2 coatings, play an essential role. It is crucial to understand the interplay between the parameters of the coating synthesis and the characteristics of the coating. The impact of the deposition parameters on the structural, mechanical and frictional properties of MoSx thin films, which are synthesized by high-power impulse magnetron sputtering, are studied. The morphology, topography and stoichiometry (2.02 < x < 2.22) of the films are controlled by, in particular, the bias-voltage and heating power applied during the sputtering process. In combination with a low pulse frequency the hardness and elastic stiffness of the MoSx films are enhanced up to 2 and 90 GPa, respectively. This enhancement is assigned to a shortening of the Mo-S bonding lengths and a strengthening in the interatomic coupling as well as to a formation of small-sized crystallites at the surface. The friction coefficient reduces to µ = 0.10 for films with an initial (100) orientation and the mean roughness of the MoSx films decreases below 15 nm by shortening the cathode pulses.

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Modification of structure and wear resistance of closed-field unbalanced-magnetron sputtered MoS2 film by vacuum-heat-treatment

Cited by 25 publications

References 53 publications

The Improvement of the Irradiation Resistance of Amorphous MoS2 Films by Thermal Annealing

The Improvement of the Irradiation Resistance of Amorphous MoS2 Films by Thermal Annealing

Friction Characteristics of Molybdenum Disulfide Thin Films Synthesized via Plasma Sulfurization

Controlling the Structural, Mechanical and Frictional Properties of MoSx Coatings by High-Power Impulse Magnetron Sputtering

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