Modification of surface properties on a nitride based coating films through mirror-quality finish grinding

Katahira, Kazutoshi; Ohmori, Hitoshi; Komotori, Jun; Dornfeld, David; Kotani, Hiroshi; Mizutani, Masayoshi

doi:10.1016/j.cirp.2010.03.132

Cited by 7 publications

(1 citation statement)

References 8 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The peeling and detachment of coatings during processing make it difficult to obtain an ideal machining surface, but the higher the TiO2 content in the coating, the lower the occurrence rate of peeling and detachment. Katahira et al [17] proposed a high surface quality machining method for titanium nitride based coatings, which achieves a high-quality surface layer and higher residual compressive stress on the machined surface through specific precision grinding processes. Masoumi et al [18] studied the grinding force, specific energy, and material removal mechanism during surface grinding of HVOF-Sprayed coating, and found that an increase in cutting speed leads to a transition from brittleness to toughness, while most of the energy is consumed by plastic flow patterns.…”

Section: Introductionmentioning

confidence: 99%

Experimental investigations into the effect of process parameters on the machining quality for ITO conductive glass using by micro grooves grinding

Liu,

Qiu,

Sun

et al. 2023

Preprint

View full text Add to dashboard Cite

To investigate the effect of micro-scale grinding on the quality of ITO conductive glass, this paper conducted micro-scale grinding experiments on ITO conductive glass. The influence of process parameters on machining quality was analyzed using micro-grinding force, surface roughness, and sheet resistance as indicators. Meanwhile, soda-lime glass was set as the control group to analyze the effect of ITO film. The results indicate that brittle fracture is the main removal method for ITO films, and the glass substrate exhibits two different removal methods, brittle and ductile, depending on the process parameters. The ITO thin film layer suppresses the sheet deformation of the glass substrate, increasing the grinding force and reducing the processing quality. Increasing the spindle speed, reducing the feed speed, and reducing the cutting depth can improve the machining quality. The spindle speed has a significant impact on surface roughness, while the cutting depth has a significant impact on the sheet resistance of the thin film. In addition, soda-lime glass chips mainly appear in powder and granular form, while ITO conductive glass also has flaky thin film chips generated by interlayer fracture.

show abstract

Section: Introductionmentioning

confidence: 99%