2011
DOI: 10.1016/j.diamond.2011.03.025
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Modification of the structure of diamond with MeV ion implantation

Abstract: We present experimental results and numerical simulations to investigate the modification of structural-mechanical properties of ion-implanted single-crystal diamond.A phenomenological model is used to derive an analytical expression for the variation of mass density and elastic properties as a function of damage density in the crystal. These relations are applied together with SRIM Monte Carlo simulations to set up Finite Element simulations for the determination of internal strains and surface deformation of… Show more

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Cited by 26 publications
(19 citation statements)
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“…Hence, we modeled the depth profiles of the material properties (density, mechanical parameters) as step-like functions varying between values relevant to diamond and graphite (ρ g = 2.1 g cm −3 , E g = 10 GPa, ν g = 0.31), as shown in figure 3, where the dimensions of the graphitic region are set by the extent of the critically damaged region. With the annealed sample, the obtained three-dimensional mass-density distribution and spatially varying mechanical properties are input into the FEM numerical simulations, to estimate the deformation and stress fields established in the sample [59].…”
Section: Numerical Simulationsmentioning
confidence: 99%
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“…Hence, we modeled the depth profiles of the material properties (density, mechanical parameters) as step-like functions varying between values relevant to diamond and graphite (ρ g = 2.1 g cm −3 , E g = 10 GPa, ν g = 0.31), as shown in figure 3, where the dimensions of the graphitic region are set by the extent of the critically damaged region. With the annealed sample, the obtained three-dimensional mass-density distribution and spatially varying mechanical properties are input into the FEM numerical simulations, to estimate the deformation and stress fields established in the sample [59].…”
Section: Numerical Simulationsmentioning
confidence: 99%
“…Note that while in principle these numbers should be known constants, in practice there is sufficient ambiguity in the literature as to their values, and hence treating them as parameters is appropriate. The other parameters, such as the mass-density and the mechanical properties of diamond, amorphized carbon and graphite, were taken from the accepted literature values [44,51,59].…”
Section: Numerical Simulationsmentioning
confidence: 99%
“…FEM simulations were carried out using the "Structural mechanics" module in COMSOL Multiphysics ver. 4.3 44 : basically, the local density variation is modelled as a constrained volume expansion, similar to a thermal expansion problem, as reported in 31,32 . Material properties for calculations were taken from literature, as done in previous works 21,33,45 :d =1220…”
Section: D Modelling Of Implanted Layermentioning
confidence: 99%
“…where aC is the amorphous carbon density, F is the implantation fluence and α is an empirical parameter depending on the implantation conditions that accounts for the defect recombination probability 32,33 . The mass density variation profile corresponding to a 1. , as shown in Fig.…”
Section: D Modelling Of Non-uniformly Damaged Layers In Diamondmentioning
confidence: 99%
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