2015
DOI: 10.1002/marc.201500589
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Modification Pathways for Copoly(2‐oxazoline)s Enabling Their Application as Antireflective Coatings in Photolithography

Abstract: Chromophore-functionalized copoly(2-oxazoline)s are successfully evaluated as bottom antireflective coatings (BARCs) in high-resolution photolithography. With respect to UV light sources used in photolithographic production routines, anthracene is chosen as a chromophore. For application as polymer in BARCs, the copolymer poly(2-ethyl-2-oxazolin)45 -stat-poly(2-dec-9'-enyl-2-oxazolin)20 -stat-poly(2-(3'-(1"-(anthracen-9-ylmethyl)-1",2",3"-triazol-4-yl)propyl)-2-oxazolin)35 can be synthesized by the Huisgen cyc… Show more

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Cited by 8 publications
(4 citation statements)
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“…Hydrogels from synthetic polymers and biopolymers can be useful in many biomedical applications, such as drug delivery, tissue engineering, wound healing, regenerative medicine, cell therapies, and ophthalmology. The majority of studies on synthetic polymer hydrogels are based on the use of PEG [ 93 ], PVP [ 94 ], poly(vinyl alcohol) (PVA) [ 95 ], poly(hydroxyethyl methacrylate) (PHEMA) [ 96 ], and, more recently, poly(2-oxazoline)s (POx) [ 97 , 98 , 99 , 100 ].…”
Section: Poly(2-isopropenyl-2-oxazoline) In Biomedical Applicationsmentioning
confidence: 99%
“…Hydrogels from synthetic polymers and biopolymers can be useful in many biomedical applications, such as drug delivery, tissue engineering, wound healing, regenerative medicine, cell therapies, and ophthalmology. The majority of studies on synthetic polymer hydrogels are based on the use of PEG [ 93 ], PVP [ 94 ], poly(vinyl alcohol) (PVA) [ 95 ], poly(hydroxyethyl methacrylate) (PHEMA) [ 96 ], and, more recently, poly(2-oxazoline)s (POx) [ 97 , 98 , 99 , 100 ].…”
Section: Poly(2-isopropenyl-2-oxazoline) In Biomedical Applicationsmentioning
confidence: 99%
“…Light-emitting diodes (LEDs) [154], solar cells [155] (including thin-film ones [156]), thermophotovoltaics [157], lasers [158], displays [32] and photolithography [159], are among the main emerging applications of ARCs.…”
Section: Applicationsmentioning
confidence: 99%
“…These functionalities are of interest for various click reactions, such as copper­(I)-catalyzed azide cycloaddition as well as thiol–ene and thiol–yne reactions, which enable facile postfunctionalization of the resulting polymers. Click reactions on PAOx are typically performed by using copolymers and have found many practical applications, such as the introduction of targeting molecules on polymeric chains, coatings of nanoparticles or stainless steel, creation of biocompatible materials with anode-selective deposition behavior, , and many others. , In addition, postpolymerization modification readily enables the introduction of side-chains that are not compatible with the CROP of 2-oxazolines . Moreover, cross-linking of alkene- and/or alkyne-functionalized PAOx has been applied for the development of hydrogels or core–shell cross-linked nanoparticles. ,, …”
Section: Introductionmentioning
confidence: 99%