Vanadium dioxide (VO 2 ) is a phase change material that undergoes a reversible semiconductor-to-metal transition that can be triggered thermally, electrically, or optically. VO 2 exhibits this sharp first-order phase transition at a temperature of %68 C. [1,2] This phase transformation from monoclinic phase to rutile metallic phase leads to a considerable change in the electrical and optical properties of VO 2 thin films and nanostructures, primarily in the infrared (IR) and near-infrared regime (NIR) spectral range. As this phase transition is reversible, occurs near room temperature, and can occur at ultrafast speeds, [3][4][5][6] several applications of VO 2 films and nanostructures have emerged, such as temperature-dependent sensors, [7] optoelectronics, [2] optical switches, [8,9] and smart windows. [10,11] In recent years, there have been several studies on the plasmonic behavior of VO 2 nanostructures. [9,12,13] The temperaturedependent variation of the refractive index of VO 2 enables thermally induced modulation of plasmon resonance wavelengths in the VO 2 nanostructures. [12] More recently, composite materials consisting of metallic thin films or nanostructures of plasmonically active metals (such as gold and silver) either embedded in or surrounded by VO 2 have gained importance, as greater tunability of the plasmon resonances can be achieved in these composite structures. [14][15][16] Tunable plasmon resonances have been studied in VO 2 -Au nanocomposites, with gold plasmon resonance wavelengths blueshifting with an increase in temperature. [17] Devices with nanoparticles of Au present on top of thin films of VO 2 have also been studied. [18] More recently, a VO 2 /Au/ VO 2 thermochromic structure was studied in which the thermochromic characteristics of the structure were dependent on the gold deposition thickness. [19] Metamaterials based on VO 2 /Au lamellar stacks have also been reported, [20] such that their optical dispersion phase changes upon semiconductor-to-metal transition of the VO 2 layers. A VO 2 /Au/VO 2 sandwich structure was proposed for smart windows such that the color of the windows could be attained by controlling the gold thickness. [21] More recently, several lithography-based techniques have been employed-such as electron beam lithography, [14,15] focused ion beam (FIB) milling, [22] and nanosphere lithography-for the fabrication of the composite materials consisting of plasmonic nanostructures and VO 2 . Modulation of optical transmission in the NIR spectral regime was reported with subwavelength nanohole arrays in a metal-VO 2 double-layer film. [22] Plasmonic switches based on a combination of electron beam lithography (EBL)-fabricated aluminum nanohole arrays and VO 2 have also been reported for use in the C, L, and U optical communication bands. [23] Although precise nanostructures could be fabricated using electron-beam lithography and FIB milling, large-area fabrication of plasmonic switching devices using these methods is time-consuming and expensive. Patterned VO 2 n...