Modified subaperture tool influence functions of a flat-pitch polisher with reverse-calculated material removal rate

Dong, Zhichao; Cheng, Haobo; Tam, Hwa Yaw

doi:10.1364/ao.53.002455

Cited by 20 publications

(5 citation statements)

References 26 publications

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“…This work presents a multifunctional system, namely, JR-1800 [17] that is competent for these fabrication and metrology works. It possesses bound and loose abrasive lapping, polishing, and on-machine 3D profile measurement for plane, sphere, and aspheric mirrors.…”

Section: Introductionmentioning

confidence: 99%

Developing on-machine 3D profile measurement for deterministic fabrication of aspheric mirrors

Dong¹,

Cheng²,

Ye³

et al. 2014

Appl. Opt.

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Three-dimensional profile measurement is perceived as an indispensable process for deterministic fabrication of aspheric mirrors. In this work, we develop on-machine 3D profile measurement on a subaperture polishing machine, namely, JR-1800. The influences of mechanical errors, misalignments, output stability, temperature variation, and natural vibration are investigated in detail by calibration, mechanical alignment, and finite-element analysis. Two quantitative methods are presented for aligning the turntable, length gauge, and workpiece into together. An error compensation model is also developed for further eliminating misalignments. For feasibility validation, two prototypical workpieces are measured by JR-1800 and an interferometer. The results indicate that JR-1800 has an RMS repeatability of ~λ/30 (λ=632.8 nm). The data provided by the two systems are highly coincident. Direct subtractions of the results from the two systems indicate that the RMS deviations for both segments are less than 0.07 μm.

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Section: Introductionmentioning

confidence: 99%

Developing on-machine 3D profile measurement for deterministic fabrication of aspheric mirrors

Dong¹,

Cheng²,

Ye³

et al. 2014

Appl. Opt.

Self Cite

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“…The bonnet [58], spin [68], and fluid-jet [49] TIFs violate NC1 since they either have a biased peak location or peaks are not unique. The spin and orbital [68,69] TIFs do not satisfy NC2, as their functions end abruptly, and the second derivatives are singular. The orbital TIF is also a piecewise function with discontinuous even derivatives at the transition points.…”

Section: Function-form Iterative Methods (Fim)mentioning

confidence: 99%

A comprehensive review of dwell time optimization methods in computer-controlled optical surfacing

Wang,

Ke,

Huang

et al. 2024

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Dwell time plays a vital role in determining the accuracy and convergence of the computer-controlled optical surfacing process. However, optimizing dwell time presents a challenge due to its ill-posed nature, resulting in non-unique solutions. To address this issue, several well-known methods have emerged, including the iterative, Bayesian, Fourier transform, and matrix-form methods. Despite their independent development, these methods share common objectives, such as minimizing residual errors, ensuring dwell time's positivity and smoothness, minimizing total processing time, and enabling flexible dwell positions. This paper aims to comprehensively review the existing dwell time optimization methods, explore their interrelationships, provide insights for their effective implementations, evaluate their performances, and ultimately propose a unified dwell time optimization methodology.

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“…The Orbital TIF is also derived from Equation ( 6) but is much more complicated than the previous two TIFs. Dong et al provided a well-organized derivation of the Orbital TIF [23], which is summarized as follows:…”

Section: The Orbital Tifmentioning

confidence: 99%

Statistical Tool Size Study for Computer-Controlled Optical Surfacing

et al. 2023

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Over the past few decades, computer-controlled optical surfacing (CCOS) systems have become more deterministic. A target surface profile can be predictably achieved with a combination of tools of different sizes. However, deciding the optimal set of tool sizes that will achieve the target residual error in the shortest run time is difficult, and no general guidance has been proposed in the literature. In this paper, we present a computer-assisted study on choosing the proper tool size for a given surface error map. First, we propose that the characteristic frequency ratio (CFR) can be used as a general measure of the correction capability of a tool over a surface map. Second, the performance of different CFRs is quantitatively studied with a computer simulation by applying them to guide the tool size selection for polishing a large number of randomly generated surface maps with similar initial spatial frequencies and root mean square errors. Finally, we find that CFR = 0.75 achieves the most stable trade-off between the total run time and the number of iterations and thus can be used as a general criterion in tool size selection for CCOS processes. To the best of our knowledge, the CFR is the first criterion that ties tool size selection to overall efficiency.

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Modified subaperture tool influence functions of a flat-pitch polisher with reverse-calculated material removal rate

Cited by 20 publications

References 26 publications

Developing on-machine 3D profile measurement for deterministic fabrication of aspheric mirrors

Developing on-machine 3D profile measurement for deterministic fabrication of aspheric mirrors

A comprehensive review of dwell time optimization methods in computer-controlled optical surfacing

Statistical Tool Size Study for Computer-Controlled Optical Surfacing

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