Modular constructed metal-grid arrays—an alternative to silicon-based microplasma devices for catalytic applications

Dzikowski, Sebastian; Michaud, Ronan; Böttner, Henrik; Dussart, Rémi; Böke, Marc; Gathen, Volker Schulz-von der

doi:10.1088/1361-6595/ab71f6

Cited by 9 publications

(25 citation statements)

References 30 publications

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“…The intensity in the DPP is about 20% higher and starts about 5 μs later than in the IPP. This is a deviation from the behaviour at lower pressures where several large intensity peaks could be observed [13]. These could be associated with ionisation waves travelling across the array.…”

Section: Time-resolved Measurementsmentioning

confidence: 69%

“…A further parameter for controlling the discharge within a microplasma array is given by pressure. To investigate its influence a device was installed in a vacuum chamber described previously [13]. Here, a single MGA having 100 μm cavities is operated with a voltage at 600 V and a frequency of 15 kHz.…”

Section: Pressurementioning

confidence: 99%

“…A candidate for comparable experiments is realised by so-called micro cavity plasma arrays (MCPA) [1,[11][12][13]. One representative is a modular and flexible layer-constructed metal grid array (MGA) consisting of two electrodes separated by a dielectric foil.…”

Section: Introductionmentioning

confidence: 99%

“…One representative is a modular and flexible layer-constructed metal grid array (MGA) consisting of two electrodes separated by a dielectric foil. The high voltage supplied electrode contains hundreds to thousands of regularly arranged cavities in the 100 μm range [13]. The confinement into the cavities is the main characteristic of the array devices and ensures a reproducible and defined operation.…”

Section: Introductionmentioning

confidence: 99%

“…Here, to resolve and to measure the spectral components a plane grating spectrometer backed with an iCCDcamera is used. The surface DBD [13] is supplied with a bipolar triangular waveform excitation and allows a simultaneous operation of four arrays with different cavity diameters in the 100 μm range comparable to experiments on silicon-based micro arrays [25]. To obtain a better understanding, the electric field is investigated half-phase resolved in dependency on typical excitation and operation parameters such as the applied voltage amplitude, frequency and pressure.…”

Section: Introductionmentioning

confidence: 99%

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Electric field strengths within a micro cavity plasma array measured by Stark shift and splitting of a helium line pair

Dzikowski

Steuer

Iséni

et al. 2022

Plasma Sources Sci. Technol.

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The electric ﬁeld is a fundamental parameter for plasma sources and devices. Its knowledge is a dominant setscrew for many processes such as controllable ﬂuxes and energies of charged particles onto surfaces and for the electron energy distribution function. However, experimental data of electric ﬁeld strengths in micro-structured surface dielectric barrier discharges are rare. Due to geometric conﬁgurations and dimensions in micrometer scale, probe-based investigations are challenging. To tackle these issues, we exploit the optical access into micro cavities of a plasma array to use the Stark eﬀect of the allowed 492.19 nm (1D ?→1P o) and forbidden 492.06 nm helium line (1F o ?→1P o). Based on it, we present spatially-integrated and time-resolved electric ﬁeld strengths in a range between 20 kV cm-1and 60 kV cm-1depending on various parameters such as cavity diameters in 100 µm range and excitation properties. The obtained electric ﬁelds can be controlled just by bipolarity of applied voltage and show a good agreement to previous simulated ﬁeld strengths in pore and silicon-based devices. As expected from simulation dealing with discharges in pores, a smaller cavity dimension yields higher electric ﬁeld strengths. Due to these high electric ﬁelds and the option of this plasma source to easily integrate a catalyst in the discharge volume, this micro cavity plasma array promises further insights into plasma-enhanced catalysis.

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Section: Time-resolved Measurementsmentioning

confidence: 69%

Section: Pressurementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Electric field strengths within a micro cavity plasma array measured by Stark shift and splitting of a helium line pair

Dzikowski

Steuer

Iséni

et al. 2022

Plasma Sources Sci. Technol.

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Mode transition in a helium barrier discharge with oxygen admixtures: insights into a micro cavity plasma array reactor

Steuer,

van Impel,

Labenski

et al. 2024

J. Phys. D: Appl. Phys.

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Dielectric barrier discharges (DBDs) offer great potential for applications such as volatile organic compounds (VOCs) conversion or plasma catalysis. For many of these applications, an admixture of molecular oxygen is important, for example, to oxidize the gases to be treated. However, oxygen addition can lead to a drastic change in discharge dynamics, which may affect conversion efficiency. The discharge may transition to a filamentary mode, which could influence plasma chemical processes or in extreme cases potentially damage the reactor. This study investigates the discharge mode of a micro cavity plasma array operated at atmospheric pressure with a helium flow (1-2 slm) containing small oxygen admixtures (0-5 %). A multitude of parameters as voltage, current, power, and emission are investigated for characterization. Additionally, the electric field, mean electron energy and atomic oxygen density are examined depending on the oxygen admixture. With pure helium, a homogeneous atmospheric pressure glow discharge (APGD) is observed, appearing as a quasi-continuous glow discharge. With small oxygen admixtures (0.1-1 %), individual discharge pulses become visible, though they remain separated (pseudo glow discharge). At higher oxygen admixtures (≧1 %), a mode transition to a filamentary discharge is observed. The measurements indicate that the discharge mode, especially the individual discharge pulses, has a significant impact on conversion efficiency. This knowledge can help in the future to fine-tune the discharge mode using external parameters such as voltage waveform or frequency to optimize conversion efficiency.

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Intra-cavity dynamics in a microplasma channel by side-on imaging

Kreuznacht

Böke

Gathen

2021

Plasma Sources Sci. Technol.

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Here, a microplasma channel was investigated. The design was developed from a recently presented modular microplasma array. The setup consists of three stacked layers: a magnet, a dielectric foil and two nickel foils that are separated by a 120 μm wide gap. The magnet is grounded while the two nickel foils are powered. The channel is in two dimensions identical (50 μm high and 120 μm wide) to a single cavity of the microplasma arrays while it is two orders of magnitude longer. Unlike the microplasma arrays, the channel provides an additional optical access to the inside of the cavity from the side. The setup was operated with a triangular voltage with a frequency of 10 kHz and an amplitude of up to 700 V at atmospheric pressure. Phase resolved emission images were used to investigate the microplasma channel dynamics with line of sight from the top and from the side to the inside of the cavity. The top view images revealed that the discharge in the microplasma channel and the microplasma arrays behave similar. The already known asymmetric discharge behavior, the self-pulsing and the wavelike ignition was also observed in the microplasma channel. For the wavelike ignition in the channel a simple one dimensional model was proposed. With the additional side view images the asymmetric discharge behavior was examined more thoroughly. Unlike in the microplasma arrays, the discharge expands here in both half periods of the applied voltage above the upper edge of the powered electrodes. The discharge extends over a larger width in the half period, in which the potential of the upper electrodes is increasing, while it extends over a larger height in the other half period. Phase resolved images were also used to investigate the ignition phase of the discharge. The discharge ignites in the two half periods on a different height. This was explained by modeling the drift and diffusion of the charged particles between two discharge pulses. The new insights into the discharge dynamics in the microplasma channel will help to understand the behavior of the discharge in the microplasma arrays.

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Modular constructed metal-grid arrays—an alternative to silicon-based microplasma devices for catalytic applications

Cited by 9 publications

References 30 publications

Electric field strengths within a micro cavity plasma array measured by Stark shift and splitting of a helium line pair

Electric field strengths within a micro cavity plasma array measured by Stark shift and splitting of a helium line pair

Mode transition in a helium barrier discharge with oxygen admixtures: insights into a micro cavity plasma array reactor

Intra-cavity dynamics in a microplasma channel by side-on imaging

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