Nano-scale randomly textured front transparent oxides are superposed on micro-scale etched glass substrates to form modulated surface textures. The resulting enhanced light scattering is implemented in single and double junction thin-film silicon solar cells.OCIS codes: 290.5825, 240.6700, 310.6845, Light scattering at textured interfaces leads to an increased optical path length of light in thin absorber layers resulting in an enhanced light absorption. Especially multi-junction thin-film silicon solar cells need an efficient scattering at long wavelengths to deliver a high photocurrent. Interface textures can be introduced into thin-film silicon solar cells by texturing glass and/or transparent conductive oxide (TCO) surfaces. Combining texturing at both glass and TCO leads to advanced surface textures. Recently, a couple of techniques have been introduced to render textured glassy substrates, such as wet [1][2][3] or dry etching [4] laser scribing [5] and molding of nanotextures on glass coated with transparent photo-resists [6]. We introduced a generalized approach, called modulated surface texturing, which combines different techniques, materials, and shapes in order to create the advanced surface texture [7] . This concept allows us to analyze the advanced textures, understand underlying physics for obtaining high scattering levels, and design substrates with novel surface textures.A substrate with modulated surface texture (MST) can be prepared as a stack of layers in which a different texture is introduced at each individual interface. The first texture that has the largest features is called the background texture. The stack may comprise layers of the same or different materials and the resulting surface accommodates all lateral and vertical components. Different scattering mechanisms are superposed in a MST, resulting in higher scattering levels in a broad wavelength range in comparison to the scattering contributions from individual morphologies. To model scattering behavior of MST structures we propose a combined approach using the scalar scattering theory, that describes a wavelength-dependent exponential decay of the haze of transmitted light (H T ), and the Mie solution of Maxwell equations, that describes scattering from objects with micrometer-scale features. The long wavelength haze value (offset effect) is determined by the background texture that can be manipulated by changing the correlation length and the peak-to-peak height of surface features.We have fabricated a series of five MST substrates by combining large surface features of etched glass (EG, background texture), that we call EG1-EG5, with randomly-textured sputtered ZnO:Al (AZO rough, AZOR) exhibiting crater-like features (modulator). To control the surface morphology of the background textures, a sacrificial layer was applied to the glass prior to wet etching, based on a mix of HF and H 2 O 2 . With increasing thickness of the sacrificial layer textures with larger features were obtained on the glass surface. The morp...