Moisture Barrier Properties of Single-Layer Graphene Deposited on Cu Films for Cu Metallization

Gomasang, Ploybussara; Abe, Takumi; Kawahara, Kenji; Wasai, Yoko; Nabatova-Gabain, Nataliya; Cuong, Nguyen Thanh; Ago, Hiroki; Okada, Susumu; Ueno, Kazuyoshi

doi:10.7567/ssdm.2017.h-1-02

Cited by 1 publication

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“…2(b), to clearly understand the correlation for the C-based thin films by focusing on the mixing composition ratio of SLG to a-C in the non-uniform SLG layer and the thickness of oxidized Cu, as previously reported. 15) This model has the simplest structure for analyzing layer thickness. The generated ellipsometric parameters also fit measured parameters with an acceptable MSE.…”

Section: Experimental Methodsmentioning

confidence: 99%

“…The obtained results were compared with those of the basic model previously reported. 15) 3. Results and discussion 32,33) In the case of the Cu surface without the SLG film, the surface gradually changed in color and become uniformly dark after ADT, which obviously indicates that the Cu surface was oxidized.…”

Section: Experimental Methodsmentioning

confidence: 99%

“…An improved SE model was developed and analyzed further along with the previous analysis results with the basic model. 15)…”

Section: Introductionmentioning

confidence: 99%

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Moisture barrier properties of single-layer graphene deposited on Cu films for Cu metallization

Gomasang¹,

Abe²,

Kawahara³

et al. 2018

Jpn. J. Appl. Phys.

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The moisture barrier properties of large-grain single-layer graphene (SLG) deposited on a Cu(111)/sapphire substrate are demonstrated by comparing with the bare Cu(111) surface under an accelerated degradation test (ADT) at 85 °C and 85% relative humidity (RH) for various durations. The change in surface color and the formation of Cu oxide are investigated by optical microscopy (OM) and X-ray photoelectron spectroscopy (XPS), respectively. First-principle simulation is performed to understand the mechanisms underlying the barrier properties of SLG against O diffusion. The correlation between Cu oxide thickness and SLG quality are also analyzed by spectroscopic ellipsometry (SE) measured on a non-uniform SLG film. SLG with large grains shows high performance in preventing the Cu oxidation due to moisture during ADT.

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Section: Experimental Methodsmentioning

confidence: 99%